METHOD FOR CALCULATION OF MASK SPECIFICATION CONTRIBUTION TO LITHOGRAPHIC BUDGETS
2020 ◽
Keyword(s):
In this work we consider the contribution of tolerances on the mask pattern quality to the error budgets of lithographic operations. A method for developing a photomask specification based on the lithography modeling is proposed.
2003 ◽
2013 ◽
Vol 12
(2)
◽
pp. 021003
◽
Keyword(s):
2004 ◽
Vol 22
(6)
◽
pp. 3053
◽