scholarly journals Present Status and Challenge of Metal Organic Vapor Phase Epitaxy Equipment for the Epitaxial Growth of GaN Power Electronic Devices on Silicon Substrate

2011 ◽  
Vol 54 (6) ◽  
pp. 376-380 ◽  
Author(s):  
Koh MATSUMOTO ◽  
Akinori UBUKATA ◽  
Jun YAMAMOTO ◽  
Yoshiki YANO ◽  
Kazutada IKENAGA ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Vapor Phase ◽  
Silicon Substrate ◽  
Present Status ◽  
Electronic Devices ◽  
Vapor Phase Epitaxy ◽  
Power Electronic ◽  
Organic Vapor ◽  
Metal Organic

Epitaxial growth of InGaAs on misoriented GaAs(100) substrate by metal-organic vapor phase epitaxy

2002 ◽  
Vol 236 (1-3) ◽  
pp. 31-36 ◽  
Author(s):  
Y Takano ◽  
M Masuda ◽  
K Kobayashi ◽  
K Kuwahara ◽  
S Fuke ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Organic Vapor ◽  
Metal Organic

scholarly journals Two stage epitaxial growth of wafer-size multilayer h-BN by metal-organic vapor phase epitaxy – a homoepitaxial approach

2D Materials ◽  
2020 ◽  
Vol 8 (1) ◽  
pp. 015017
Author(s):  
Aleksandra Krystyna Dąbrowska ◽  
Mateusz Tokarczyk ◽  
Grzegorz Kowalski ◽  
Johannes Binder ◽  
Rafał Bożek ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Two Stage ◽  
Organic Vapor ◽  
Metal Organic ◽  
Wafer Size

scholarly journals Epitaxial Growth of Wafer-Scale Molybdenum Disulfide/Graphene Heterostructures by Metal–Organic Vapor-Phase Epitaxy and Their Application in Photodetectors

2020 ◽  
Vol 12 (39) ◽  
pp. 44335-44344 ◽  
Author(s):  
Anh Tuan Hoang ◽  
Ajit K. Katiyar ◽  
Heechang Shin ◽  
Neeraj Mishra ◽  
Stiven Forti ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Molybdenum Disulfide ◽  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Wafer Scale ◽  
Organic Vapor ◽  
Metal Organic

Metal-organic vapor-phase epitaxial growth of HgCdTe device heterostructures on three-inch-diameter substrates

2003 ◽  
Vol 32 (7) ◽  
pp. 656-660 ◽  
Author(s):  
C. D. Maxey ◽  
J. P. Camplin ◽  
I. T. Guilfoy ◽  
J. Gardner ◽  
R. A. Lockett ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Vapor Phase ◽  
Organic Vapor ◽  
Metal Organic
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