Application of Laser Scanning Microscope to Analyze Forward Voltage Snapback of Compound Semiconductors

Author(s):  
M. L. Morris ◽  
B. Cook ◽  
J. DiSilvestro

Abstract A forward voltage (Vf) snapback phenomenon was observed during the analysis of silicon doped gallium-arsenide (GaAs) light emitting diodes (LEOs). In this paper emphasis is placed on both the techniques used during the analysis and the information obtained. Apart from the standard curve tracer characterizations, and utilization of two microsection techniques, significance is placed on the use of a laser scanning microscope (LSM). The LSM has four main analys is features: photoemission (FE) microscopy, optical beam induced current (OBIC), confocal microscopy and infrared laser scanning microscopy [1]. The analysis of the LEOs utilizes two of these features, PE microscopy and OBlC analysis. These techniques are used in a complementary fashion to analyze the forward voltage snapback. The analysis reveals two independent wafer processing related issues, a junction anomaly and an unintentional phantom junction at the substrate to epi interface. Both phenomena can result in the LED Vf snapback.

Author(s):  
Thomas M. Jovin ◽  
Michel Robert-Nicoud ◽  
Donna J. Arndt-Jovin ◽  
Thorsten Schormann

Light microscopic techniques for visualizing biomolecules and biochemical processes in situ have become indispensable in studies concerning the structural organization of supramolecular assemblies in cells and of processes during the cell cycle, transformation, differentiation, and development. Confocal laser scanning microscopy offers a number of advantages for the in situ localization and quantitation of fluorescence labeled targets and probes: (i) rejection of interfering signals emanating from out-of-focus and adjacent structures, allowing the “optical sectioning” of the specimen and 3-D reconstruction without time consuming deconvolution; (ii) increased spatial resolution; (iii) electronic control of contrast and magnification; (iv) simultanous imaging of the specimen by optical phenomena based on incident, scattered, emitted, and transmitted light; and (v) simultanous use of different fluorescent probes and types of detectors.We currently use a confocal laser scanning microscope CLSM (Zeiss, Oberkochen) equipped with 3-laser excitation (u.v - visible) and confocal optics in the fluorescence mode, as well as a computer-controlled X-Y-Z scanning stage with 0.1 μ resolution.


1997 ◽  
Author(s):  
Fu-Jen Kao ◽  
L. J. Chang ◽  
Sheng-Lung Huang ◽  
Shaw-An Chen ◽  
Kuen-Ru Chuang ◽  
...  

2017 ◽  
Vol 10 (11) ◽  
pp. 1526-1537 ◽  
Author(s):  
Y. X. Li ◽  
V. Gautam ◽  
A. Brüstle ◽  
I. A. Cockburn ◽  
V. R. Daria ◽  
...  

2006 ◽  
Vol 77 (4) ◽  
pp. 046101 ◽  
Author(s):  
Xiaohua Lv ◽  
Chen Zhan ◽  
Shaoqun Zeng ◽  
Wei R. Chen ◽  
Qingming Luo

Sign in / Sign up

Export Citation Format

Share Document