EBIRCH Localization for Low-Current Soft Fails

Mapping Intimacies ◽

10.31399/asm.cp.istfa2021p0253 ◽

2021 ◽

Author(s):

Gregory M. Johnson ◽

Andreas Rummel

Keyword(s):

Experimental Study ◽

Careful Consideration ◽

Seebeck Effect ◽

Current Direction ◽

Minimum Level ◽

Applied Bias ◽

Sem Imaging

Abstract An experimental study was undertaken to determine the minimum level of leakage or shorting current could be detected by EBIRCH. A 22 nm SRAM array was overstressed with a series gradually increasing bias, followed by EBIRCH scans with 1 V applied bias and 2 kV SEM imaging, until fins were observed. The result was that with only 12 nA of shorting current, the fins of a pulldown device could be imaged by EBIRCH. Higher stresses created an ohmic short, and careful consideration of experiments with current direction provide additional evidence that EBIRCH is largely a temperaturedriven, or Seebeck effect.

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An Experimental Study for Minimum Level of Decalcification to Detect the Osteolytic Bone Metastasis of Long Bone on Plain Radiography

Journal of Bone Metabolism ◽

10.11005/jbm.2016.23.3.135 ◽

2016 ◽

Vol 23 (3) ◽

pp. 135

Author(s):

Jun Ho Baek ◽

Il Hyung Park ◽

Sung Hwa Seo

Keyword(s):

Experimental Study ◽

Bone Metastasis ◽

Plain Radiography ◽

Long Bone ◽

Minimum Level ◽

Osteolytic Bone Metastasis

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Selective Dry Etch Removal of Si and SiOxNy for Advanced Electron Beam Probing Applications

10.31399/asm.cp.istfa2021p0414 ◽

2021 ◽

Author(s):

Mary Edmonds ◽

Thaddeus Cox ◽

John Markulin ◽

Martin von Haartman

Keyword(s):

Metal Layer ◽

Laser Interferometry ◽

Preparation Technique ◽

Structural Failure ◽

Applied Bias ◽

Sem Image ◽

Sample Preparation Technique ◽

Selective Etch ◽

Sem Imaging ◽

Dry Etch

Abstract This paper presents a global die level sample preparation technique utilizing selective etch chemistry and laser interferometry to expose the entire die top-most metal layer surface for Ebeam electrical FI. A novel Ebeam based probing technique referred to as StaMPS is introduced alongside this prep technique to isolate logic structure failures observed through SEM image contrasts at different logic states. By landing SEM probe tips on exposed metal pads and controlling logic states via an applied bias, the varying states produce different contrast within SEM imaging highlighting structural failure locations. This global prep technique in combination with StaMPS Ebeam FI creates faster FI/FA turn-around time by delivering a globally delayered full die in under an hour and creating opportunity to locate several defect types within a single sample.

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Does it Matter Where You Teach? Insights from a Quasi-Experimental Study on Student Engagement in an Active Learning Classroom

Teaching & Learning Inquiry The ISSOTL Journal ◽

10.20343/teachlearninqu.8.2.10 ◽

2020 ◽

Vol 8 (2) ◽

pp. 140-164

Author(s):

Victoria Holec ◽

Richelle Marynowski

Keyword(s):

Experimental Study ◽

Student Engagement ◽

Active Learning ◽

Student Performance ◽

Course Design ◽

Careful Consideration ◽

Traditional Classroom ◽

Fundamental Theory ◽

Student Surveys ◽

Quasi Experimental

Active learning has experienced a recent resurgence with the advent of specialized active learning classrooms. While the fundamental theory behind active learning is anything but new, a relatively recent finding is that active learning pedagogies thrive in suitable active learning classrooms. To date, studies of active learning have focused on outcomes such as student performance. The quasi-experimental study described in this article investigated self-ratings of student engagement as an outcome of active learning in active learning classrooms using a novel instrument that accounts for known factors of engagement in addition to the contribution of the learning environment—the classroom. We delineated the relative contributions of instructor, classmates, and classroom to self-rated student engagement through student surveys in both a traditional classroom and an active learning classroom in two highly similar courses with the same instructor. Our findings were that the configuration of the classroom had a direct influence on self-ratings of student engagement above and beyond instructor contributions. In this article, we describe these findings and how, with careful consideration of course design and a classroom that fits the instructor’s pedagogy, optimal levels of perceived student engagement can be achieved. This knowledge is important to future educational policy on construction and scheduling, as the resurgence of active learning in higher education increasingly reveals deficiencies in physical learning environments.

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Experimental study on the restoration from a tilt-azimuth series for improvement in resolution

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s042482010013955x ◽

1995 ◽

Vol 53 ◽

pp. 636-637

Author(s):

Norio Baba ◽

Norihiko Ichise ◽

Syunya Watanabe

Keyword(s):

Experimental Study ◽

Spherical Aberration ◽

Incident Beam ◽

Optical Parameters ◽

Beam Tilting ◽

Illumination Method ◽

Restoration Method ◽

Illumination Mode

The tilted beam illumination method is used to improve the resolution comparing with the axial illumination mode. Using this advantage, a restoration method of several tilted beam images covering the full azimuthal range was proposed by Saxton, and experimentally examined. To make this technique more reliable it seems that some practical problems still remain. In this report the restoration was attempted and the problems were considered. In our study, four problems were pointed out for the experiment of the restoration. (1) Accurate beam tilt adjustment to fit the incident beam to the coma-free axis for the symmetrical beam tilting over the full azimuthal range. (2) Accurate measurements of the optical parameters which are necessary to design the restoration filter. Even if the spherical aberration coefficient Cs is known with accuracy and the axial astigmatism is sufficiently compensated, at least the defocus value must be measured. (3) Accurate alignment of the tilt-azimuth series images.

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Rem Study of Current Effect on the Structure of Clean Si(111) Surface

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100180288 ◽

1990 ◽

Vol 48 (1) ◽

pp. 306-307

Author(s):

A. Yamanaka ◽

H. Ohse ◽

K. Yagi

Keyword(s):

The Other ◽

Current Direction ◽

Clean Surface ◽

Current Effect ◽

Atomic Steps ◽

Step Bunching ◽

Terrace Width ◽

Step Down ◽

A Current

Recently current effects on clean and metal adsorbate surfaces have attracted much attention not only because of interesting phenomena but also because of practically importance in treatingclean and metal adsorbate surfaces [1-6]. In the former case, metals deposited migrate on the deposit depending on the current direction and a patch of the deposit expands on the clean surface [1]. The migration is closely related to the adsorbate structures and substrate structures including their anisotropy [2,7]. In the latter case, configurations of surface atomic steps depends on the current direction. In the case of Si(001) surface equally spaced array of monatom high steps along the [110] direction produces the 2x1 and 1x2 terraces. However, a relative terrace width of the two domain depends on the current direction; a step-up current widen terraces on which dimers are parallel to the current, while a step-down current widen the other terraces [3]. On (111) surface, a step-down current produces step bunching at temperatures between 1250-1350°C, while a step-up current produces step bunching at temperatures between 1050-1250°C [5].In the present paper, our REM observations on a current induced step bunching, started independently, are described.Our results are summarized as follows.(1) Above around 1000°C a step-up current induces step bunching. The phenomenon reverses around 1200 C; a step-down current induces step bunching. The observations agree with the previous reports [5].

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