Selective Dry Etch Removal of Si and SiOxNy for Advanced Electron Beam Probing Applications

This paper presents a global die level sample preparation technique utilizing selective etch chemistry and laser interferometry to expose the entire die top-most metal layer surface for Ebeam electrical FI. A novel Ebeam based probing technique referred to as StaMPS is introduced alongside this prep technique to isolate logic structure failures observed through SEM image contrasts at different logic states. By landing SEM probe tips on exposed metal pads and controlling logic states via an applied bias, the varying states produce different contrast within SEM imaging highlighting structural failure locations. This global prep technique in combination with StaMPS Ebeam FI creates faster FI/FA turn-around time by delivering a globally delayered full die in under an hour and creating opportunity to locate several defect types within a single sample.

Fast and Effective Sample Preparation Technique for Backside Fault Isolation on GaN Packaged Devices

This paper describes a fast and effective sample preparation method to allow backside fault localization on GaN package devices. Backside analysis by Photon Emission Microscopy (PEM) is becoming preferable to frontside analysis when the die is covered by metal layers. This paper describes an optimized method for backside sample preparation on GaN package devices having a thick heavily doped p-type silicon substrate. The method combines mechanical and chemical deprocessing steps, resulting in a fast and effective sample preparation technique for PEM analysis. Additionally, the laser marking process parameters to facilitate orientation during the final physical failure analysis by Focused Ion Beam (FIB) are also shared.

Simultaneous determination of Avanafil and Dapoxetine in human plasma using liquid chromatography/tandem mass spectrometry (LC-MS/MS) based on a protein precipitation technique

A rapid and selective LC-MS/MS method is described for the simultaneous assay of Avanafil and Dapoxetine in human plasma via a protein precipitation (PP) sample preparation technique.

Cutting-Edge Sample Preparation from FIB to Ar Concentrated Ion Beam Milling of Advanced Semiconductor Devices

Fast and accurate examination from the bulk to the specific area of the defect in advanced semiconductor devices is critical in failure analysis. This work presents the use of Ar ion milling methods in combination with Ga focused ion beam (FIB) milling as a cutting-edge sample preparation technique from the bulk to specific areas by FIB lift-out without sample-preparation-induced artifacts. The result is an accurately delayered sample from which electron-transparent TEM specimens of less than 15 nm are obtained.

Comparison of Different Sample Preparation Techniques for Untargeted Metabolomics utilizing Q-TOF LC/MS and MetaboAnalyst 4.0

Background: Profiling the whole metabolome with a single injection is not an easy process because the chemical and physical properties of metabolites are totally different within each other and the analytical methodologies and datamining procedures need lots of effort to make such an approach for real. This reality leads researchers to select an already applied methodology for metabolite profiling and analyze the samples through identical techniques. Objective: In this study, it was focused whether the sample preparation techniques on human blood samples prior to QTOF LC/MS analysis affect the number of detectable peaks and to analyze the matched metabolites of these peaks. The results were compared within each other. Method: Precipitation of proteins with methanol, ultrafiltration (Amicon® Ultra 3 kDa 0.5 mL Centrifugal Filters), liquidphase extraction (EXtrelut® NT 3 cartridges) and solid-phase extraction (Supelco HybridSPE®-Phospholipid Cartridge) were used for sample preparation on commercial pooled plasmas samples. C18 column (Agilent Zorbax 1.8 μM, 50 x 2.1 mm) was used as the chromatography column. Q-TOF LC/MS analysis was performed on positive ionization mode. XCMS and MetaboAnalyst 4.0 - MS Peaks to Pathways utility were used to evaluate the raw data. Results: Although the number of detected peaks through precipitation with methanol was the highest one (624 peaks), the detected peaks observed through ultrafiltration sample preparation technique matched with the highest number of metabolite peaks (151 metabolites). The number of the matched peaks with metabolites on liquid phase extraction (81 metabolites) was higher than the ones for solid phase extraction (29 metabolites). Conclusion: The results in this study may provide a novel perspective to analytical chemists working with clinicians to select their sample preparation technique prior to Q-TOF LC/MS based untargeted metabolomic approaches.