Bulk acoustic resonator devices using ZnO-based film and back cavity

European Journal of Electrical Engineering ◽

10.3166/ejee.19.111-125 ◽

2017 ◽

Vol 19 (1-2) ◽

pp. 111-125

Author(s):

Xin LI ◽

Mengwei LIU ◽

Yanlu FENG

Keyword(s):

Acoustic Resonator

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PARAMETRIC OSCILLATIONS IN A LIQUID FILLED ACOUSTIC RESONATOR

Le Journal de Physique Colloques ◽

10.1051/jphyscol:1972660 ◽

1972 ◽

Vol 33 (C6) ◽

pp. C6-281-C6-284

Author(s):

P. J. KING

Keyword(s):

Acoustic Resonator ◽

Parametric Oscillations

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Low loss film bulk acoustic resonator in liquid environments

10.32469/10355/6083 ◽

2008 ◽

Author(s):

Sai Sumanth Pottigari

Keyword(s):

Acoustic Resonator ◽

Low Loss ◽

Film Bulk Acoustic Resonator ◽

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Design of a FBAR (Film Bulk Acoustic Resonator) Oscillator at 1.6 GHz

Micro and Nanosystems ◽

10.2174/1876402911103020091 ◽

2011 ◽

Vol 3 (2) ◽

pp. 91-98 ◽

Author(s):

Xu Zhang ◽

Wencheng Xu ◽

Junseok Chae

Keyword(s):

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

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Antichiral edge states in an acoustic resonator lattice with staggered air flow

Journal of Applied Physics ◽

10.1063/5.0050645 ◽

2021 ◽

Vol 129 (23) ◽

pp. 235103

Author(s):

Letian Yu ◽

Haoran Xue ◽

Baile Zhang

Keyword(s):

Air Flow ◽

Acoustic Resonator ◽

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High Q Single-Mode High-Tone Bulk Acoustic Resonator Integrated With Surface-Micromachined FBAR Filter

IEEE MTT-S International Microwave Symposium Digest, 2005. ◽

10.1109/mtt67880.2005.9387931 ◽

2005 ◽

Author(s):

Wei Pang ◽

Hao Zhang ◽

Jong Jin Kim ◽

Hongyu Yu ◽

Eun Sok Kim

Keyword(s):

Single Mode ◽

Acoustic Resonator ◽

High Tone ◽

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AlN-based film buck acoustic resonator operated in shear mode for detection of carcinoembryonic antigens

RSC Advances ◽

10.1039/c5ra21900k ◽

2016 ◽

Vol 6 (6) ◽

pp. 4908-4913 ◽

Author(s):

Dan Zheng ◽

Juan Xiong ◽

Peng Guo ◽

Shengfu Wang ◽

Haoshuang Gu

Keyword(s):

Acoustic Resonator ◽

Carcinoembryonic Antigens

A film buck acoustic resonator (FBAR) operated in shear mode was fabricated and integrated with a microchannel for detection of the carcinoembryonic antigens (CEA).

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Orientation fluctuation trend of Pt and ZnO layers in film bulk acoustic resonator

Physica B Condensed Matter ◽

10.1016/j.physb.2007.06.028 ◽

2007 ◽

Vol 400 (1-2) ◽

pp. 38-41 ◽

Author(s):

Zhi Yan ◽

Yi Ming Mi ◽

Zhi Tang Song ◽

Wei Li Liu ◽

Hong Ji ◽

...

Keyword(s):

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

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Air-gap type film bulk acoustic resonator using flexible thin substrate

Sensors and Actuators A Physical ◽

10.1016/j.sna.2004.05.035 ◽

2005 ◽

Vol 117 (1) ◽

pp. 62-70 ◽

Author(s):

Yu-Ri Kang ◽

Sung-Chul Kang ◽

Kyeong-Kap Paek ◽

Yong-Kook Kim ◽

Soo-Won Kim ◽

...

Keyword(s):

Acoustic Resonator ◽

Air Gap ◽

Film Bulk Acoustic Resonator ◽

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Silicon Bulk Micromachined High Q Film Bulk Acoustic Resonator Devices with Mo/AlN/Mo Structures

Integrated Ferroelectrics ◽

10.1080/10584580590899289 ◽

2005 ◽

Vol 69 (1) ◽

pp. 323-332 ◽

Author(s):

Heechul Lee ◽

Jaeyeong Park ◽

Kyunghak Lee ◽

Youngjoon Ko ◽

Jonguk Bu

Keyword(s):

Acoustic Resonator ◽

High Q ◽

Silicon Bulk ◽

Film Bulk Acoustic Resonator ◽

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Laser Acoustic Imaging of Film Bulk Acoustic Resonator (FBAR) Lateral Mode Dispersion

10.1063/1.1916685 ◽

2005 ◽

Author(s):

Ken L. Telschow

Keyword(s):

Acoustic Resonator ◽

Acoustic Imaging ◽

Mode Dispersion ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

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