scholarly journals SPATIAL LIGHT DISTRIBUTION IN MAGNETO OPTICAL SYSTEMS FOR HIGH NUMERICAL APERTURE AND SOLID IMMERSION LENS FOCUSING: INFLUENCE ON THERMAL AND MO EFFECTS

2002 ◽  
Vol 2 (4) ◽  
pp. 336-340
Author(s):  
A. Lagrange ◽  
L. Poupinet ◽  
M. Armand ◽  
B. Béchevet
Keyword(s):  
Numerical Aperture ◽  
Light Distribution ◽  
Optical Systems ◽  
Solid Immersion Lens ◽  
High Numerical Aperture

Sample Preparation for High Numerical Aperture Solid Immersion Lens Laser Imaging

2014 ◽  
Author(s):  
M.S. Wei ◽  
H.B. Chong ◽  
S.H. Lim ◽  
C. Richardson
Keyword(s):  
Sample Preparation ◽  
Focal Length ◽  
Numerical Aperture ◽  
Fault Isolation ◽  
Numerical Control ◽  
Thickness Variation ◽  
Solid Immersion Lens ◽  
Laser Imaging ◽  
High Numerical Aperture ◽  
Silicon Thickness

Abstract High resolution laser imaging, using high numerical aperture (NA) solid immersion lens (SIL) for backside fault isolation imposes stringent sample preparation requirements; as a result of the short focal length of SIL, a die must be thinned to a targeted thickness with less than a ±5 μm silicon thickness variation across the entire die. Flip chip packaged dice suffer from warpage due to various package sizes and substrate thicknesses. Such broad spectrums of part geometries pose a great challenge to meet such silicon planarity requirements. As relaxation of the packaged silicon during polishing causes the warpage profile to change dynamically and unpredictably throughout the thinning process, it has become an added challenge to meet the stringent sample preparation requirements. To overcome the stochastic nature of this problem, a two-step polishing recipe consisting of computer numerical control (CNC) mechanical milling and polishing processes has been developed to achieve sufficient silicon thickness uniformity to enable SIL imaging across an entire silicon chip as large as approximately 20 mm x 15 mm.

Phase retrieval for high-numerical-aperture optical systems

2003 ◽  
Vol 28 (10) ◽  
pp. 801 ◽  
Author(s):  
Bridget M. Hanser ◽  
Mats G. L. Gustafsson ◽  
David A. Agard ◽  
John W. Sedat
Keyword(s):  
Phase Retrieval ◽  
Numerical Aperture ◽  
Optical Systems ◽  
High Numerical Aperture

A high numerical aperture solid immersion lens magneto-optical recording system

1999 ◽  
Vol 35 (5) ◽  
pp. 3100-3105 ◽  
Author(s):  
A. Chekanov ◽  
M. Birukawa ◽  
Y. Itoh ◽  
T. Suzuki
Keyword(s):  
Numerical Aperture ◽  
Optical Recording ◽  
Recording System ◽  
Solid Immersion Lens ◽  
High Numerical Aperture

Analysis of Phase Distribution of Focused Light in High Numerical Aperture Systems

2010 ◽  
Vol 437 ◽  
pp. 616-620
Author(s):  
Alexander Normatov ◽  
Boris Spektor ◽  
Joseph Shamir
Keyword(s):  
Phase Distribution ◽  
Numerical Aperture ◽  
Mathematical Expression ◽  
Optical Systems ◽  
Entrance Pupil ◽  
High Numerical Aperture ◽  
Diffraction Integral ◽  
Quadratic Phase ◽  
The Difference ◽  
Kirchhoff Integral

High numerical aperture focusing is becoming increasingly important for nanotechnology related applications. Rigorous, vector evaluation of the focused field, in such cases, is usually performed using the Richards-Wolf method which is based on the Debye approach. The resulting field is known to have a piecewise quasi planar phase. A corresponding result, produced by a Fresnel-Kirchhoff integral for aplanatic optical systems of medium and low numerical apertures, leads to the well known physical fact that a quadratic phase exists when the entrance pupil is not located at the front focal plane. Yet, the amplitudes produced in both ways are in a good agreement. In this work we investigated the difference, presented above, in a 2D system with the help of the Stratton-Chu diffraction integral. The amplitude obtained by the Stratton-Chu integral was quite similar to the classic results while the phase exhibited a quadratic behavior, with the quadratic coefficient depending on the numerical aperture of the optical system. For lower numerical apertures it approached the result obtained by the Fresnel-Kirchhoff integral while for higher numerical apertures it was approaching the Richards-Wolf result. A mathematical expression for the quadratic coefficient was derived and verified for various values of numerical aperture.

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