Development of Piezo-Actuated Two-Degree-of-Freedom Fast Tool Servo System

Fast tool servo (FTS) machining technology is a promising method for freeform surfaces and machining micro-nanostructure surfaces. However, limited degrees of freedom (DOF) is an inherent drawback of existing FTS technologies. In this paper, a piezo-actuated serial structure FTS system is developed to obtain translational motions along with z and x-axis directions for ultra-precision machining. In addition, the principle of the developed 2-DOF FTS is introduced and explained. A high-rigidity four-bar (HRFB) mechanism is proposed to produce motion along the z-axis direction. Additionally, through a micro-rotation motion around flexible bearing hinges (FBHs), bi-directional motions along the x-axis direction can be produced. The kinematics of the mechanism are described using a matrix-based compliance modeling (MCM) method, and then the static analysis and dynamic analysis are performed using finite element analysis (FEA). Testing experiments were conducted to investigate the actual performance of the developed system. The results show that low coupling, proper travel, and high natural frequency are obtained. Finally, a sinusoidal wavy surface is uniformly generated by the mechanism developed to demonstrate the effectiveness of the FTS system.

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Development of a Three Axis controlled Fast Tool Servo for Ultra Precision Machining (1st Report)

Journal of the Japan Society for Precision Engineering ◽

10.2493/jjspe.73.1345 ◽

2007 ◽

Vol 73 (12) ◽

pp. 1345-1349 ◽

Cited By ~ 11

Author(s):

Toshihiko WADA ◽

Masayuki TAKAHASHI ◽

Toshimichi MORIWAKI ◽

Keiichi NAKAMOTO

Keyword(s):

Precision Machining ◽

Fast Tool Servo ◽

Ultra Precision

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Finite Element Analysis and Optimization of Thermal Deformation of Resin Concrete Manufacturing Bases

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.543-547.4010 ◽

2014 ◽

Vol 543-547 ◽

pp. 4010-4013

Author(s):

Yao Chen ◽

Xiu Xia Liang ◽

Shuang Qiu

Keyword(s):

Thermal Stability ◽

Machine Tool ◽

Thermal Deformation ◽

Precision Machining ◽

Element Analysis ◽

Excellent Thermal Stability ◽

Good Thermal Stability ◽

Machining Center ◽

Ultra Precision ◽

Thermal Stability Of

Resin concrete generally has good mechanical properties, excellent thermal stability and great vibration resistance, the model of the ultra-precision machining center bed is established to study the thermal stability of the resin concrete using virtual reality and collaborative simulation technology based on Pro/E and ANSYS Workbench. The main factors that affect the machine tool bed thermal deformation were found through analyzing the deformation results and the materials and restrain conditions were optimized. The results proved that the optimized machine tool bed has good thermal stability and theoretical basis was provided to improve the thermal stability of the ultra-precision machining centers.

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Design and Analysis of a Planar Piezo-Actuated Nanopositioner with Millimeter Scale Stroke

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.679.143 ◽

2016 ◽

Vol 679 ◽

pp. 143-148

Author(s):

Hui Tang ◽

Jian Gao ◽

Xin Chen ◽

Lan Yu Zhang ◽

Zhao He Zeng

Keyword(s):

Degrees Of Freedom ◽

Cross Coupling ◽

Optimal Designs ◽

Fast Tool Servo ◽

Precision Manufacturing ◽

Element Analysis ◽

Satisfactory Performance ◽

The Finite Element Analysis ◽

High Bandwidth ◽

Promising Application

In recent years, Fast Tool Servo (FTS) mechanism in precision manufacturing equipment emerges as a promising application for the piezo-actuated flexible nanopositioner. A flexible nanopositioner with large stroke, high bandwidth, high precision and multi-Degrees-of-Freedom (multi-DOFs) is really desired for this application. In order to meet this requirement, a novel 2-DOF flexible nanopositioner consists of two pairs of differential lever displacement amplifiers (DLDA) is proposed in this paper first, also, kinetostatics modeling is conducted by using the Pseudo-Rigid Body (PRB) method. After a series of mechanism optimal designs, the performance of the designed nanopositioner is verified by using the Finite Element Analysis (FEA) method. A piezoelectric (PZT) actuator with 90 µm is selected in this simulation, the experimental results indicate that the mechanism workspace can achieve around 2.1×2.1 mm2, the bandwidth can reach up to around 136 Hz, while the cross-coupling is also kept with 1%. All the results consistently prove the proposed device possesses satisfactory performance for fulfilling the practical precision manufacturing tasks.

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Development of a Three Axis Controlled Fast Tool Servo for Ultra Precision Machining (2nd Report)

Journal of the Japan Society for Precision Engineering ◽

10.2493/jjspe.74.486 ◽

2008 ◽

Vol 74 (5) ◽

pp. 486-490 ◽

Cited By ~ 1

Author(s):

Toshihiko WADA ◽

Masayuki TAKAHASHI ◽

Toshimichi MORIWAKI ◽

Keiichi NAKAMOTO

Keyword(s):

Precision Machining ◽

Fast Tool Servo ◽

Ultra Precision

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Development of a Three Axis Controlled Fast Tool Servo for Ultra Precision Machining (3rd Report)

Journal of the Japan Society for Precision Engineering ◽

10.2493/jjspe.74.971 ◽

2008 ◽

Vol 74 (9) ◽

pp. 971-975 ◽

Cited By ~ 4

Author(s):

Toshihiko WADA ◽

Masayuki TAKAHASHI ◽

Isao TASHIRO ◽

Toshimichi MORIWAKI ◽

Keiichi NAKAMOTO

Keyword(s):

Precision Machining ◽

Fast Tool Servo ◽

Ultra Precision

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Performance analysis and optimal design of fast tool servo used for machining microstructured surfaces

Proceedings of the Institution of Mechanical Engineers Part C Journal of Mechanical Engineering Science ◽

10.1243/09544062jmes696 ◽

2008 ◽

Vol 222 (8) ◽

pp. 1541-1546 ◽

Cited By ~ 10

Author(s):

Y Yang ◽

S Chen ◽

D Huo ◽

K Cheng

Keyword(s):

Optimal Design ◽

Design Method ◽

Structural Parameters ◽

Fast Tool Servo ◽

Element Analysis ◽

Microstructured Surfaces ◽

The Finite Element Analysis ◽

Machining System ◽

Positioning Device ◽

Ultra Precision

Ultra-precision machining with a fast tool servo (FTS) is one of the leading methodologies for the fabrication of microstructured surfaces. FTS is an independently operated positioning device that plays an important role in the machining system. The complexity of surface features and the surface quality depend largely on the behaviour of FTS. In this paper, according to the analysis of required performance, a novel FTS is developed with structural parameters optimized by the finite-element analysis (FEA) method. Finally, a series of tests are carried out to evaluate the performance of the FTS and validate the value obtained by the FEA software. The results show that the FTS has a travel of 20 μm, a positioning resolution of 5 nm, a static stiffness of 33.62 N/μm, and a dominant natural frequency of 2191 Hz and demonstrate the validity of the optimal design method.

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Structures Analysis and Optimum Design of the Large Stroke Two-Axis Fast Tool Servo

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.853.477 ◽

2013 ◽

Vol 853 ◽

pp. 477-481 ◽

Cited By ~ 1

Author(s):

Jia Qi Wu ◽

Qing Zou ◽

Tao Wang ◽

Qi Chao Zhang ◽

Yong Li Zhang ◽

...

Keyword(s):

Surface Analysis ◽

Optimum Design ◽

Degrees Of Freedom ◽

Static Characteristic ◽

Structure Design ◽

Degree Of Freedom ◽

Strength Characteristics ◽

Fast Tool Servo ◽

Design Requirements ◽

Two Degree Of Freedom

A two degree of freedom large-stroke linear FTS device was designed in this paper, the device with flexible hinges as the guidance and support part, achieved the linear degrees of freedom in X and Z. In addition, structure design and optimizationanalysis of static characteristic and dynamic characteristicresponse surface analysis of FTS device were worked as well in this paper ,then the stiffness and strength characteristics of FTS device has been greatly improved, fully meet the design requirements, achieved the desired effect.

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Development of a Novel Three Degrees-of-Freedom Rotary Vibration-Assisted Micropolishing System Based on Piezoelectric Actuation

Micromachines ◽

10.3390/mi10080502 ◽

2019 ◽

Vol 10 (8) ◽

pp. 502 ◽

Cited By ~ 2

Author(s):

Yan Gu ◽

Xiuyuan Chen ◽

Faxiang Lu ◽

Jieqiong Lin ◽

Allen Yi ◽

...

Keyword(s):

High Performance ◽

Degrees Of Freedom ◽

Resonant Mode ◽

Static Properties ◽

Workpiece Material ◽

Element Analysis ◽

Amplification Ratio ◽

Compliance Modeling ◽

Practical Performance ◽

Rotary Vibration

The limited degrees of freedom (DOF) and movement form of the compliant vibration-assisted processing device are inherent constraints of the polishing technique. In this paper, a concept of a 3-DOF rotary vibration-assisted micropolishing system (3D RVMS) is proposed and demonstrated. The 3-DOF means the proposed vibration-assisted polishing device (VPD) is driven by three piezo-electric (PZT) actuators. Compared with the current vibration-assisted polishing technology which generates a trajectory with orthogonal actuators or parallel actuators, a novel 3-DOF piezoelectrically actuated VPD was designed to enable the workpiece to move along the rotational direction. Meanwhile, the proposed VPD can deliver large processing stoke in mrad scale and can be operated at a flexible non-resonant mode. A matrix-based compliance modeling method was adopted for calculating the compliance and amplification ratio of the VPD. Additionally, the dynamic and static properties of the developed VPD were verified using finite element analysis. Then, the VPD was manufactured and experimentally tested to investigate its practical performance. Finally, various polished surfaces which used silicon carbide (SiC) ceramic as workpiece material were uniformly generated by the high-performance 3D RVMS. Compared with a nonvibration polishing system, surface roughness was clearly improved by introducing rotary vibration-assisted processing. Both the analysis and experiments verified the effectiveness of the present 3D RVMS for micro-machining surfaces.

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