scholarly journals Development of a Three Axis controlled Fast Tool Servo for Ultra Precision Machining (1st Report)

2007 ◽  
Vol 73 (12) ◽  
pp. 1345-1349 ◽  
Author(s):  
Toshihiko WADA ◽  
Masayuki TAKAHASHI ◽  
Toshimichi MORIWAKI ◽  
Keiichi NAKAMOTO
Keyword(s):  
Precision Machining ◽  
Fast Tool Servo ◽  
Ultra Precision

scholarly journals Development of a Three Axis Controlled Fast Tool Servo for Ultra Precision Machining (2nd Report)

2008 ◽  
Vol 74 (5) ◽  
pp. 486-490 ◽  
Author(s):  
Toshihiko WADA ◽  
Masayuki TAKAHASHI ◽  
Toshimichi MORIWAKI ◽  
Keiichi NAKAMOTO
Keyword(s):  
Precision Machining ◽  
Fast Tool Servo ◽  
Ultra Precision

scholarly journals Development of a Three Axis Controlled Fast Tool Servo for Ultra Precision Machining (3rd Report)

2008 ◽  
Vol 74 (9) ◽  
pp. 971-975 ◽  
Author(s):  
Toshihiko WADA ◽  
Masayuki TAKAHASHI ◽  
Isao TASHIRO ◽  
Toshimichi MORIWAKI ◽  
Keiichi NAKAMOTO
Keyword(s):  
Precision Machining ◽  
Fast Tool Servo ◽  
Ultra Precision

scholarly journals Development of Piezo-Actuated Two-Degree-of-Freedom Fast Tool Servo System

Micromachines ◽  
2019 ◽  
Vol 10 (5) ◽  
pp. 337 ◽  
Author(s):  
Yamei Liu ◽  
Yanping Zheng ◽  
Yan Gu ◽  
Jieqiong Lin ◽  
Mingming Lu ◽  
...  
Keyword(s):  
Degrees Of Freedom ◽  
Precision Machining ◽  
Fast Tool Servo ◽  
Element Analysis ◽  
Actual Performance ◽  
Axis Direction ◽  
Compliance Modeling ◽  
Ultra Precision ◽  
Rotation Motion ◽  
Two Degree Of Freedom

Fast tool servo (FTS) machining technology is a promising method for freeform surfaces and machining micro-nanostructure surfaces. However, limited degrees of freedom (DOF) is an inherent drawback of existing FTS technologies. In this paper, a piezo-actuated serial structure FTS system is developed to obtain translational motions along with z and x-axis directions for ultra-precision machining. In addition, the principle of the developed 2-DOF FTS is introduced and explained. A high-rigidity four-bar (HRFB) mechanism is proposed to produce motion along the z-axis direction. Additionally, through a micro-rotation motion around flexible bearing hinges (FBHs), bi-directional motions along the x-axis direction can be produced. The kinematics of the mechanism are described using a matrix-based compliance modeling (MCM) method, and then the static analysis and dynamic analysis are performed using finite element analysis (FEA). Testing experiments were conducted to investigate the actual performance of the developed system. The results show that low coupling, proper travel, and high natural frequency are obtained. Finally, a sinusoidal wavy surface is uniformly generated by the mechanism developed to demonstrate the effectiveness of the FTS system.

Fast tool servo control for ultra-precision machining at extremely low feed rates

Mechatronics ◽  
1998 ◽  
Vol 8 (4) ◽  
pp. 381-393 ◽  
Author(s):  
Sang-soon Ku ◽  
Gary Larsen ◽  
Sabri Cetinkunt
Keyword(s):  
Servo Control ◽  
Precision Machining ◽  
Fast Tool Servo ◽  
Ultra Precision

An Investigation of Form Compensation in Fabricating Microlens Arrays by Ultra-Precision Fast-Tool-Servo Technology

2006 ◽  
Vol 532-533 ◽  
pp. 689-692 ◽  
Author(s):  
Tsz Chun Kwok ◽  
Suet To ◽  
Chi Fai Cheung ◽  
Su Juan Wang ◽  
Wing Bun Lee
Keyword(s):  
Measurement Data ◽  
Precision Machining ◽  
High Tech ◽  
Fast Tool Servo ◽  
Form Error ◽  
Microlens Arrays ◽  
Ultra Precision ◽  
Radius Compensation ◽  
Critical Components ◽  
Tool Compensation

Microlens arrays are widely used as critical components in a large number of photonics and telecommunication products. The increasing demand for high-tech products provides an expanding room for the development of the micro-fabrication technology. This study presents a tool compensation for correcting the form error of fabricated microlenses in ultra-precision machining with fast-tool-servo (FTS) system. After presentation of optimal cutting conditions deduced on the basis of cutting experiments of microlens arrays, a tool radius compensation method will be proposed and evaluated in this paper. This methodology makes use of form measurement data from a Form Talysurf system to modify the C program employed in the software of ultra-precision machining FTS system – SOP. The form error was successfully reduced after implementation of tool compensation.

scholarly journals A Self-Established “Machining-Measurement-Evaluation” Integrated Platform for Taper Cutting Experiments and Applications

Micromachines ◽  
2021 ◽  
Vol 12 (8) ◽  
pp. 929
Author(s):  
Xudong Yang ◽  
Zexiao Li ◽  
Linlin Zhu ◽  
Yuchu Dong ◽  
Lei Liu ◽  
...  
Keyword(s):  
Three Dimensional ◽  
Precision Machining ◽  
Two Dimensional ◽  
Dimensional Image ◽  
Two Dimensional Image ◽  
Integrated Platform ◽  
Hard And Brittle Materials ◽  
Ultra Precision ◽  
Cutting Experiments

Taper-cutting experiments are important means of exploring the nano-cutting mechanisms of hard and brittle materials. Under current cutting conditions, the brittle-ductile transition depth (BDTD) of a material can be obtained through a taper-cutting experiment. However, taper-cutting experiments mostly rely on ultra-precision machining tools, which have a low efficiency and high cost, and it is thus difficult to realize in situ measurements. For taper-cut surfaces, three-dimensional microscopy and two-dimensional image calculation methods are generally used to obtain the BDTDs of materials, which have a great degree of subjectivity, leading to low accuracy. In this paper, an integrated system-processing platform is designed and established in order to realize the processing, measurement, and evaluation of taper-cutting experiments on hard and brittle materials. A spectral confocal sensor is introduced to assist in the assembly and adjustment of the workpiece. This system can directly perform taper-cutting experiments rather than using ultra-precision machining tools, and a small white light interference sensor is integrated for in situ measurement of the three-dimensional topography of the cutting surface. A method for the calculation of BDTD is proposed in order to accurately obtain the BDTDs of materials based on three-dimensional data that are supplemented by two-dimensional images. The results show that the cutting effects of the integrated platform on taper cutting have a strong agreement with the effects of ultra-precision machining tools, thus proving the stability and reliability of the integrated platform. The two-dimensional image measurement results show that the proposed measurement method is accurate and feasible. Finally, microstructure arrays were fabricated on the integrated platform as a typical case of a high-precision application.

scholarly journals An Investigation of the Cutting Strategy for the Machining of Polar Microstructures Used in Ultra-Precision Machining Optical Precision Measurement

Micromachines ◽  
2021 ◽  
Vol 12 (7) ◽  
pp. 755
Author(s):  
Chen-Yang Zhao ◽  
Chi-Fai Cheung ◽  
Wen-Peng Fu
Keyword(s):  
Precision Measurement ◽  
Detection Algorithm ◽  
Surface Generation ◽  
Precision Machining ◽  
Tool Geometry ◽  
Depth Of Cut ◽  
Machining Parameters ◽  
Ultra Precision ◽  
Transition Points ◽  
Cutting Strategy

In this paper, an investigation of cutting strategy is presented for the optimization of machining parameters in the ultra-precision machining of polar microstructures, which are used for optical precision measurement. The critical machining parameters affecting the surface generation and surface quality in the machining of polar microstructures are studied. Hence, the critical ranges of machining parameters have been determined through a series of cutting simulations, as well as cutting experiments. First of all, the influence of field of view (FOV) is investigated. After that, theoretical modeling of polar microstructures is built to generate the simulated surface topography of polar microstructures. A feature point detection algorithm is built for image processing of polar microstructures. Hence, an experimental investigation of the influence of cutting tool geometry, depth of cut, and groove spacing of polar microstructures was conducted. There are transition points from which the patterns of surface generation of polar microstructures vary with the machining parameters. The optimization of machining parameters and determination of the optimized cutting strategy are undertaken in the ultra-precision machining of polar microstructures.

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