scholarly journals Single-Shot Imaging of Two-Wavelength Spatial Phase-Shifting Interferometry

Sensors ◽  
2019 ◽  
Vol 19 (23) ◽  
pp. 5094 ◽  
Author(s):  
Jun Woo Jeon ◽  
Ki-Nam Joo

In this investigation, we propose an effective method to measure 3D surface profiles of specimens with single-shot imaging. Based on the two-wavelength interferometric principle and spatial phase-shifting technique using a polarization pixelated camera, the proposed system can not only rapidly measure the phase, but also overcome the 2π-ambiguity problem of typical phase-shifting interferometry. The rough surface profile can be calculated by the visibility of the interference fringe and can compensate for the height discontinuity by phase jumps occurring in a fine height map. An inclined plane mirror and a step height specimen with 9 μm were used for the validation of capability of measuring continuously smooth surface and large step heights. The measurement results were in good agreement with the results of typical two-wavelength interferometry.

2012 ◽  
Vol 285 (5) ◽  
pp. 517-520 ◽  
Author(s):  
Maurizio Vannoni ◽  
Mauro Melozzi ◽  
Marco Barilli ◽  
Andrea Sordini ◽  
Giuseppe Molesini

2017 ◽  
Author(s):  
Tatsuki Tahara ◽  
Takeya Kanno ◽  
Yasuhiko Arai ◽  
Takeaki Ozawa

2011 ◽  
Vol 36 (16) ◽  
pp. 3254 ◽  
Author(s):  
Tatsuki Tahara ◽  
Yasuhiro Awatsuji ◽  
Yuki Shimozato ◽  
Takashi Kakue ◽  
Kenzo Nishio ◽  
...  

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