scholarly journals Development of Reliable, High Performance WLCSP for BSI CMOS Image Sensor for Automotive Application

Sensors ◽  
2020 ◽  
Vol 20 (15) ◽  
pp. 4077
Author(s):  
Tianshen Zhou ◽  
Shuying Ma ◽  
Daquan Yu ◽  
Ming Li ◽  
Tao Hang

To meet the urgent market demand for small package size and high reliability performance for automotive CMOS image sensor (CIS) application, wafer level chip scale packaging (WLCSP) technology using through silicon vias (TSV) needs to be developed to replace current chip on board (COB) packages. In this paper, a WLCSP with the size of 5.82 mm × 5.22 mm and thickness of 850 μm was developed for the backside illumination (BSI) CIS chip using a 65 nm node with a size of 5.8 mm × 5.2 mm. The packaged product has 1392 × 976 pixels and a resolution of up to 60 frames per second with more than 120 dB dynamic range. The structure of the 3D package was designed and the key fabrication processes on a 12” inch wafer were investigated. More than 98% yield and excellent optical performance of the CIS package was achieved after process optimization. The final packages were qualified by AEC-Q100 Grade 2.

2017 ◽  
Vol 137 (2) ◽  
pp. 48-58
Author(s):  
Noriyuki Fujimori ◽  
Takatoshi Igarashi ◽  
Takahiro Shimohata ◽  
Takuro Suyama ◽  
Kazuhiro Yoshida ◽  
...  

2020 ◽  
Vol 2020 (7) ◽  
pp. 143-1-143-6 ◽  
Author(s):  
Yasuyuki Fujihara ◽  
Maasa Murata ◽  
Shota Nakayama ◽  
Rihito Kuroda ◽  
Shigetoshi Sugawa

This paper presents a prototype linear response single exposure CMOS image sensor with two-stage lateral overflow integration trench capacitors (LOFITreCs) exhibiting over 120dB dynamic range with 11.4Me- full well capacity (FWC) and maximum signal-to-noise ratio (SNR) of 70dB. The measured SNR at all switching points were over 35dB thanks to the proposed two-stage LOFITreCs.


2007 ◽  
Author(s):  
Koichi Mizobuchi ◽  
Satoru Adachi ◽  
Tomokazu Yamashita ◽  
Seiichiro Okamura ◽  
Hiromichi Oshikubo ◽  
...  

Author(s):  
Shun Kawada ◽  
Shin Sakai ◽  
Nana Akahane ◽  
Rihito Kuroda ◽  
Shigetoshi Sugawa

2018 ◽  
Vol 6 (3) ◽  
pp. 195-201 ◽  
Author(s):  
Shunsuke Tanaka ◽  
Toshinori Otaka ◽  
Kazuya Mori ◽  
Norio Yoshimura ◽  
Shinichiro Matsuo ◽  
...  

2015 ◽  
Vol 15 (2) ◽  
pp. 661-662 ◽  
Author(s):  
Xinyuan Qian ◽  
Hang Yu ◽  
Shoushun Chen ◽  
Kay Soon Low

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