scholarly journals Highly Sensitive MEMS-Type Micro Sensor for Hydrogen Gas Detection by Modifying the Surface Morphology of Pd Catalytic Metal

2014 ◽  
Vol 24 (10) ◽  
pp. 532-537 ◽  
Author(s):  
Jung-Sik Kim ◽  
Bum-Joon Kim
Author(s):  
Shuxiang Dong ◽  
Feiming Bai ◽  
Jie-Fang Li ◽  
D. Viehland

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