Highly Sensitive MEMS-Type Micro Sensor for Hydrogen Gas Detection by Modifying the Surface Morphology of Pd Catalytic Metal
2014 ◽
Vol 24
(10)
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pp. 532-537
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Keyword(s):
2016 ◽
Vol 13
(1)
◽
pp. 77-85
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Keyword(s):
2003 ◽
Vol 50
(9)
◽
pp. 1105-1113
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Keyword(s):