Application of Hartmann-Shack Sensor in Optical Readout System of Uncooled Infrared Imaging

2009 ◽  
Vol 29 (2) ◽  
pp. 490-495 ◽  
Author(s):  
马晓燠 Ma Xiaoyu ◽  
樊志华 Fan Zhihua ◽  
饶长辉 Rao Changhui ◽  
钱见 Qian Jian ◽  
史海涛 Shi Haitao
2007 ◽  
Vol 3 (2) ◽  
pp. 119-122 ◽  
Author(s):  
Q. Zhang ◽  
Z. Miao ◽  
Z. Guo ◽  
F. Dong ◽  
Z. Xiong ◽  
...  

2012 ◽  
Author(s):  
Tian Li ◽  
Yuejin Zhao ◽  
Liquan Dong ◽  
Xiaohua Liu ◽  
Wei Jia ◽  
...  

Author(s):  
Yuliang Yi ◽  
Shenglin Ma ◽  
Xiaomei Yu ◽  
Ming Liu ◽  
Xiaohua Liu

This paper presents a bi-material microcantilever focal plane array (FPA) for uncooled infrared (IR) imaging. The FPA was fabricated by a bulk silicon micromachining method with substrate silicon selectively removed by deep reactive ion etching (DRIE) technique at the area where each cantilever pixel is located. The absorbance of the IR radiation can be improved by 48% due to the selective removal of the substrate, and hence the noise equivalent temperature difference (NETD) of the FPA can be reduced by 32% compared to the one fabricated by sacrificial layer technique, approaching 60mK. The thermomechanical sensitivity and the response time of the FPA were measured and calculated to be 112nm/K and 15ms, respectively. An image of human bodies was captured by an optical readout method.


2008 ◽  
Vol 29 (3) ◽  
pp. 261-271 ◽  
Author(s):  
Binbin Jiao ◽  
Chaobo Li ◽  
Dapeng Chen ◽  
Tianchun Ye ◽  
Yi Ou ◽  
...  

2007 ◽  
Vol 137 (1) ◽  
pp. 13-19 ◽  
Author(s):  
Zheying Guo ◽  
Qingchuan Zhang ◽  
Fengliang Dong ◽  
Dapeng Chen ◽  
Zhiming Xiong ◽  
...  

2012 ◽  
Vol 32 (2) ◽  
pp. 0204002
Author(s):  
程腾 Cheng Teng ◽  
张青川 Zhang Qingchuan ◽  
高杰 Gao Jie ◽  
毛亮 Mao Liang ◽  
伍小平 Wu Xiaoping ◽  
...  

2015 ◽  
Vol 7 (34) ◽  
pp. 19201-19209 ◽  
Author(s):  
Devi D. Liana ◽  
Burkhard Raguse ◽  
J. Justin Gooding ◽  
Edith Chow

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