A Bulk Micromachined Cantilever Array for Uncooled Infrared Imaging

2008 ◽  
Author(s):  
Yuliang Yi ◽  
Shenglin Ma ◽  
Xiaomei Yu ◽  
Ming Liu ◽  
Xiaohua Liu
Keyword(s):  
Infrared Imaging ◽  
Sacrificial Layer ◽  
Ir Radiation ◽  
Deep Reactive Ion Etching ◽  
Optical Readout ◽  
Layer Technique ◽  
Cantilever Array ◽  
Noise Equivalent Temperature Difference ◽  
The One ◽  
Uncooled Infrared Imaging

This paper presents a bi-material microcantilever focal plane array (FPA) for uncooled infrared (IR) imaging. The FPA was fabricated by a bulk silicon micromachining method with substrate silicon selectively removed by deep reactive ion etching (DRIE) technique at the area where each cantilever pixel is located. The absorbance of the IR radiation can be improved by 48% due to the selective removal of the substrate, and hence the noise equivalent temperature difference (NETD) of the FPA can be reduced by 32% compared to the one fabricated by sacrificial layer technique, approaching 60mK. The thermomechanical sensitivity and the response time of the FPA were measured and calculated to be 112nm/K and 15ms, respectively. An image of human bodies was captured by an optical readout method.

Uncooled infrared imaging device based on optimized optomechanical micro-cantilever array

2008 ◽  
Vol 108 (6) ◽  
pp. 579-588 ◽  
Author(s):  
Fengliang Dong ◽  
Qingchuan Zhang ◽  
Dapeng Chen ◽  
Zhengyu Miao ◽  
Zhiming Xiong ◽  
...  
Keyword(s):  
Infrared Imaging ◽  
Imaging Device ◽  
Cantilever Array ◽  
Micro Cantilever ◽  
Uncooled Infrared Imaging

Optical readout uncooled infrared imaging detector using knife-edge filter operation

2007 ◽  
Vol 3 (2) ◽  
pp. 119-122 ◽  
Author(s):  
Q. Zhang ◽  
Z. Miao ◽  
Z. Guo ◽  
F. Dong ◽  
Z. Xiong ◽  
...  
Keyword(s):  
Infrared Imaging ◽  
Knife Edge ◽  
Optical Readout ◽  
Edge Filter ◽  
Imaging Detector ◽  
Filter Operation ◽  
Uncooled Infrared Imaging

Optimized Optomechanical Micro-Cantilever Array for Uncooled Infrared Imaging

2007 ◽  
Vol 24 (12) ◽  
pp. 3362-3364 ◽  
Author(s):  
Dong Feng-Liang ◽  
Zhang Qing-Chuan ◽  
Chen Da-Peng ◽  
Miao Zheng-Yu ◽  
Xiong Zhi-Ming ◽  
...  
Keyword(s):  
Infrared Imaging ◽  
Cantilever Array ◽  
Micro Cantilever ◽  
Uncooled Infrared Imaging

Wave-front coded optical readout for the MEMS-based uncooled infrared imaging system

2012 ◽  
Author(s):  
Tian Li ◽  
Yuejin Zhao ◽  
Liquan Dong ◽  
Xiaohua Liu ◽  
Wei Jia ◽  
...  
Keyword(s):  
Wave Front ◽  
Infrared Imaging ◽  
Imaging System ◽  
Optical Readout ◽  
Infrared Imaging System ◽  
Uncooled Infrared Imaging

scholarly journals Array of Resonant Electromechanical Nanosystems: A Technological Breakthrough for Uncooled Infrared Imaging

2018 ◽  
Author(s):  
Laurent Duraffourg ◽  
Ludovic Laurent ◽  
Jean-Sébastien Moulet ◽  
Julien Arcamone ◽  
Jean-Jacques Yon
Keyword(s):  
Infrared Imaging ◽  
Thermal Response ◽  
Integration Time ◽  
Ir Radiation ◽  
Torsional Mode ◽  
Alternative Approach ◽  
Order Of Magnitude ◽  
Nano Rods ◽  
Frequency Changes ◽  
Uncooled Infrared Imaging

Microbolometer is the most common uncooled infrared technique that allows to achieve 50mK-temperature resolution on the scene. However, this approach has to struggle with both the self-heating inherent to the resistive readout principle and the 1/f noise. We present an alternative approach that consists in using micro / nanoresonators vibrating according to a torsional mode, and whose resonant frequency changes with the incident IR-radiation. Dense arrays of such electromechanical structures were fabricated with a 12µm-pitch at low temperature allowing their integration on CMOS circuits according to a post-processing method. H-shape pixels with 9 µm-long nano-rods and a cross-section of 250 × 30 nm² were fabricated to provide large thermal responses, whose experimental measurements reached up to 1024 Hz/nW. These electromechanical resonators featured a noise equivalent power of 140pW for a response time of less than 1 ms. To our knowledge, these performance are unrivaled with such small dimensions. We also showed that a temperature sensitivity of 20 mK within 100ms-integration time is conceivable at a 12µm-pitch by co-integrating the resonators with their readout electronics and suggesting a new readout scheme. This sensitivity could be reached at short-term by depositing on top of the nano-rods a vanadium oxide layer having a phase-transition that could possibly enhance the thermal response by one order of magnitude.

Application of Hartmann-Shack Sensor in Optical Readout System of Uncooled Infrared Imaging

2009 ◽  
Vol 29 (2) ◽  
pp. 490-495 ◽  
Author(s):  
马晓燠 Ma Xiaoyu ◽  
樊志华 Fan Zhihua ◽  
饶长辉 Rao Changhui ◽  
钱见 Qian Jian ◽  
史海涛 Shi Haitao
Keyword(s):  
Infrared Imaging ◽  
Readout System ◽  
Optical Readout ◽  
Uncooled Infrared Imaging

scholarly journals Array of Resonant Electromechanical Nanosystems: A Technological Breakthrough for Uncooled Infrared Imaging

Micromachines ◽  
2018 ◽  
Vol 9 (8) ◽  
pp. 401 ◽  
Author(s):  
Laurent Duraffourg ◽  
Ludovic Laurent ◽  
Jean-Sébastien Moulet ◽  
Julien Arcamone ◽  
Jean-Jacques Yon
Keyword(s):  
Infrared Imaging ◽  
Thermal Response ◽  
Complementary Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Integration Time ◽  
Ir Radiation ◽  
Torsional Mode ◽  
Order Of Magnitude ◽  
Frequency Changes ◽  
Uncooled Infrared Imaging

Microbolometers arethe most common uncooled infrared techniques that allow 50 mK-temperature resolution to be achieved on-scene. However, this approach struggles with both self-heating, which is inherent to the resistive readout principle, and 1/f noise. We present an alternative approach that consists of using micro/nanoresonators vibrating according to a torsional mode, and whose resonant frequency changes with the incident IR-radiation. Dense arrays of such electromechanical structures were fabricated with a 12 µm pitch at low temperature, allowing their integration on complementary metal-oxide-semiconductor (CMOS) circuits according to a post-processing method. H-shape pixels with 9 µm-long nanorods and a cross-section of 250 nm × 30 nm were fabricated to provide large thermal responses, whose experimental measurements reached up to 1024 Hz/nW. These electromechanical resonators featured a noise equivalent power of 140 pW for a response time of less than 1 ms. To our knowledge, these performances are unrivaled with such small dimensions. We also showed that a temperature sensitivity of 20 mK within a 100 ms integration time is conceivable at a 12 µm pitch by co-integrating the resonators with their readout electronics, and suggesting a new readout scheme. This sensitivity could be reached short-term by depositing on top of the nanorods a vanadium oxide layer that had a phase-transition that could possibly enhance the thermal response by one order of magnitude.

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