Useful way to compensate for intrinsic birefringence caused by calcium fluoride in optical lithography systems

2018 ◽  
Vol 16 (3) ◽  
pp. 032201
Author(s):  
Zelong Zhou Zelong Zhou ◽  
Hongbo Shang Hongbo Shang ◽  
Yongxin Sui Yongxin Sui ◽  
Huaijiang Yang Huaijiang Yang
Keyword(s):  
Calcium Fluoride ◽  
Optical Lithography ◽  
Intrinsic Birefringence

Intrinsic birefringence in calcium fluoride and barium fluoride

2001 ◽  
Vol 64 (24) ◽  
Author(s):  
John Burnett ◽  
Zachary Levine ◽  
Eric Shirley
Keyword(s):  
Calcium Fluoride ◽  
Barium Fluoride ◽  
Intrinsic Birefringence

Oriented growth of large size calcium fluoride single crystals for optical lithography

2005 ◽  
Vol 280 (3-4) ◽  
pp. 462-466 ◽  
Author(s):  
N. Senguttuvan ◽  
M. Aoshima ◽  
K. Sumiya ◽  
H. Ishibashi
Keyword(s):  
Single Crystals ◽  
Calcium Fluoride ◽  
Optical Lithography ◽  
Oriented Growth ◽  
Large Size

Field - and Photoassisted Field Emission Studies of Calcium Fluoride Coated Silicon Tips

1996 ◽  
Vol 06 (C5) ◽  
pp. C5-129-C5-134
Author(s):  
V. N. Konopsky ◽  
V. V. Zhirnov ◽  
N. S. Sokolov ◽  
J. C. Alvarez ◽  
E. I. Givargizov ◽  
...  
Keyword(s):  
Field Emission ◽  
Calcium Fluoride ◽  
Emission Studies

Rapid Collagen-Directed Mineralization of Calcium Fluoride Nanocrystals with Periodically Patterned Nanostructure

Nanoscale ◽  
2021 ◽  
Author(s):  
Weijian Fang ◽  
Hang Ping ◽  
Wolfgang Wagermaier ◽  
Shenbao Jin ◽  
Shahrouz Amini ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Calcium Fluoride ◽  
Periodic Structures ◽  
Collagen Fibrils ◽  
Hydroxyapatite Nanocrystals

Collagen fibrils present periodic structures, which provide space for intrafibrillar growth of oriented hydroxyapatite nanocrystals in bone and contribute to the good mechanical properties of bone. However, there are not...

Sign in / Sign up

Export Citation Format

Share Document