Useful way to compensate for intrinsic birefringence caused by calcium fluoride in optical lithography systems

2018 ◽  
Vol 16 (3) ◽  
pp. 032201
Author(s):  
Zelong Zhou Zelong Zhou ◽  
Hongbo Shang Hongbo Shang ◽  
Yongxin Sui Yongxin Sui ◽  
Huaijiang Yang Huaijiang Yang
Keyword(s):  
Calcium Fluoride ◽  
Optical Lithography ◽  
Intrinsic Birefringence

Intrinsic birefringence in calcium fluoride and barium fluoride

2001 ◽  
Vol 64 (24) ◽  
Author(s):  
John Burnett ◽  
Zachary Levine ◽  
Eric Shirley
Keyword(s):  
Calcium Fluoride ◽  
Barium Fluoride ◽  
Intrinsic Birefringence

Oriented growth of large size calcium fluoride single crystals for optical lithography

2005 ◽  
Vol 280 (3-4) ◽  
pp. 462-466 ◽  
Author(s):  
N. Senguttuvan ◽  
M. Aoshima ◽  
K. Sumiya ◽  
H. Ishibashi
Keyword(s):  
Single Crystals ◽  
Calcium Fluoride ◽  
Optical Lithography ◽  
Oriented Growth ◽  
Large Size

202 Analysis for Optical Property of Calcium Fluoride Single Crystal with Consideration of Intrinsic Birefringence

2012 ◽  
Vol 2012.25 (0) ◽  
pp. 120-122
Author(s):  
Yuta KITAMURA ◽  
Noriyuki MIYAZAKI ◽  
Naoto NAGAKURA ◽  
Teruhiko NAWATA
Keyword(s):  
Optical Property ◽  
Single Crystal ◽  
Calcium Fluoride ◽  
Intrinsic Birefringence

Field - and Photoassisted Field Emission Studies of Calcium Fluoride Coated Silicon Tips

1996 ◽  
Vol 06 (C5) ◽  
pp. C5-129-C5-134
Author(s):  
V. N. Konopsky ◽  
V. V. Zhirnov ◽  
N. S. Sokolov ◽  
J. C. Alvarez ◽  
E. I. Givargizov ◽  
...  
Keyword(s):  
Field Emission ◽  
Calcium Fluoride ◽  
Emission Studies

Challenges for optical lithography in production at the sub-half-micron scale

1996 ◽  
Author(s):  
B. Martin
Keyword(s):  
Optical Lithography

Simultaneous removal of calcium, fluoride, nickel, and nitrate using microbial induced calcium precipitation in a biological immobilization reactor

2021 ◽  
pp. 125776
Author(s):  
Jiaran Liu ◽  
Amjad Ali ◽  
Junfeng Su ◽  
Zizhen Wu ◽  
Ruijie Zhang ◽  
...  
Keyword(s):  
Calcium Fluoride ◽  
Simultaneous Removal ◽  
Calcium Precipitation

Rapid Collagen-Directed Mineralization of Calcium Fluoride Nanocrystals with Periodically Patterned Nanostructure

Nanoscale ◽  
2021 ◽  
Author(s):  
Weijian Fang ◽  
Hang Ping ◽  
Wolfgang Wagermaier ◽  
Shenbao Jin ◽  
Shahrouz Amini ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Calcium Fluoride ◽  
Periodic Structures ◽  
Collagen Fibrils ◽  
Hydroxyapatite Nanocrystals

Collagen fibrils present periodic structures, which provide space for intrafibrillar growth of oriented hydroxyapatite nanocrystals in bone and contribute to the good mechanical properties of bone. However, there are not...

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