A Specular Stepped Surface Profile Measurement System Based on Fringe Reflection Principle with Micrometer-level Height Resolution

2020 ◽  
Vol 49 (4) ◽  
pp. 412001-412001
Author(s):  
万新军 Xin-jun WAN ◽  
吕宋 Song Lü ◽  
宋可 Ke SONG ◽  
解树平 Shu-ping XIE
Keyword(s):  
Measurement System ◽  
Surface Profile ◽  
Reflection Principle ◽  
Profile Measurement ◽  
Stepped Surface ◽  
Level Height ◽  
Surface Profile Measurement

scholarly journals In-situ fiber-based surface profile measurement system using low coherence interferometer

2018 ◽  
Author(s):  
Jon Petzing ◽  
Shreedhar Rangappa ◽  
Peter Kinnell ◽  
Ranveer S. Matharu ◽  
Tom Hovell ◽  
...  
Keyword(s):  
Measurement System ◽  
Surface Profile ◽  
Profile Measurement ◽  
Low Coherence ◽  
Surface Profile Measurement

Adaptive phase measurement system for surface profile measurement

2003 ◽  
Vol 150 (2) ◽  
pp. 113 ◽  
Author(s):  
A.J. Pugh ◽  
W. Houghton ◽  
M.R. Belmont ◽  
P.R. Shepherd ◽  
S.R. Pennock
Keyword(s):  
Measurement System ◽  
Phase Measurement ◽  
Surface Profile ◽  
Profile Measurement ◽  
Surface Profile Measurement
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