Parameter calibration of surface profile measurement system based on femtosecond laser

2019 ◽  
Author(s):  
Jie Cheng ◽  
Yaqi Chang ◽  
Haoran Gao ◽  
Dian Bian ◽  
Liandong Yu
Keyword(s):  
Femtosecond Laser ◽  
Measurement System ◽  
Surface Profile ◽  
Profile Measurement ◽  
Parameter Calibration ◽  
Surface Profile Measurement

Profile Measurement by Using a Femtosecond Laser Chromatic Confocal Probe

2020 ◽  
Author(s):  
Ryo Sato ◽  
Yuki Shimizu ◽  
Hiraku Matsukuma ◽  
Wei Gao
Keyword(s):  
Thermal Stability ◽  
Femtosecond Laser ◽  
Surface Profile ◽  
Sample Surface ◽  
Measurement Range ◽  
Laser Source ◽  
Profile Measurement ◽  
Experimental Setup ◽  
Chromatic Confocal Probe ◽  
Surface Profile Measurement

Abstract Confocal probes are widely employed in many industrial fields due to the depth-sectioning effect. The author’s group has also proposed a chromatic confocal probe employing a mode-locked femtosecond laser source which can realize an axial resolution of 30 nm and a measurement range of 40 μm Efforts have also been made to improve the thermal stability of the developed femtosecond laser chromatic confocal probe so that the probe can be applied for long-term displacement measurement or surface profile measurement. Meanwhile, surface profile measurement has not been carried out by using the developed femtosecond laser chromatic confocal probe. For the verification of the performance of developed probe in profile measurement, in this paper, an experimental setup is built and a basic experiment is carried out. By using the probe with further improved thermal stability, the measurement of a sample surface profile is carried out. In this paper, the development of the experimental setup with the femtosecond laser chromatic confocal probe, as well as the results of the surface profile measurements, is presented.

scholarly journals In-situ fiber-based surface profile measurement system using low coherence interferometer

2018 ◽  
Author(s):  
Jon Petzing ◽  
Shreedhar Rangappa ◽  
Peter Kinnell ◽  
Ranveer S. Matharu ◽  
Tom Hovell ◽  
...  
Keyword(s):  
Measurement System ◽  
Surface Profile ◽  
Profile Measurement ◽  
Low Coherence ◽  
Surface Profile Measurement

Adaptive phase measurement system for surface profile measurement

2003 ◽  
Vol 150 (2) ◽  
pp. 113 ◽  
Author(s):  
A.J. Pugh ◽  
W. Houghton ◽  
M.R. Belmont ◽  
P.R. Shepherd ◽  
S.R. Pennock
Keyword(s):  
Measurement System ◽  
Phase Measurement ◽  
Surface Profile ◽  
Profile Measurement ◽  
Surface Profile Measurement
Sign in / Sign up

Export Citation Format

Share Document