Performance Analysis of a Robust Proportional—Integral—Derivative Control Technique for the Auto-Focusing Mechanism of an Optical Surface Profile Measurement System

2010 ◽  
Vol 224 (6) ◽  
pp. 635-646
Author(s):  
N Islam ◽  
R M Parkin ◽  
M R Jackson ◽  
S Elmas ◽  
Z Kesy ◽  
...  
Keyword(s):  
Performance Analysis ◽  
Measurement System ◽  
Surface Profile ◽  
Control Technique ◽  
Profile Measurement ◽  
Proportional Integral Derivative ◽  
Optical Surface ◽  
Proportional Integral Derivative Control ◽  
Surface Profile Measurement ◽  
Auto Focusing

scholarly journals In-situ fiber-based surface profile measurement system using low coherence interferometer

2018 ◽  
Author(s):  
Jon Petzing ◽  
Shreedhar Rangappa ◽  
Peter Kinnell ◽  
Ranveer S. Matharu ◽  
Tom Hovell ◽  
...  
Keyword(s):  
Measurement System ◽  
Surface Profile ◽  
Profile Measurement ◽  
Low Coherence ◽  
Surface Profile Measurement

Adaptive phase measurement system for surface profile measurement

2003 ◽  
Vol 150 (2) ◽  
pp. 113 ◽  
Author(s):  
A.J. Pugh ◽  
W. Houghton ◽  
M.R. Belmont ◽  
P.R. Shepherd ◽  
S.R. Pennock
Keyword(s):  
Measurement System ◽  
Phase Measurement ◽  
Surface Profile ◽  
Profile Measurement ◽  
Surface Profile Measurement

On-Machine Optical Surface Profile Measuring System for Nano-Machining

2011 ◽  
Vol 5 (3) ◽  
pp. 369-376 ◽  
Author(s):  
Hiroshi Sawano ◽  
◽  
Motohiro Takahashi ◽  
Hayato Yoshioka ◽  
Hidenori Shinno ◽  
...  
Keyword(s):  
Error Detection ◽  
Machine Surface ◽  
Detection Method ◽  
Surface Profile ◽  
Optical Probe ◽  
Measuring System ◽  
Profile Measurement ◽  
Optical Surface ◽  
Increasing Demand ◽  
Surface Profile Measurement

There has been an increasing demand for machining of precision parts recently. In order to meet such requirements, nano-machining systems with on-machine surface profile measuring function are required. This paper presents a newly developed on-machine shape measuring system with an optical probe. In this system, an astigmatic focus error detection method is applied to the optical probe. In addition, the influence of the uneven reflection from the surface can be reduced by using two quadrant photodiodes. The results of surface profile measurement confirm that the system developed provides a resolution of 1 nm scale and a repeatability of approximately 50 nm.

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