Study on Dual-Parameter Simultaneous Sensing of Extrinsic Fabry-Perot Interferometric Sensor

2015 ◽  
Vol 52 (7) ◽  
pp. 070604
Author(s):  
王俊杰 Wang Junjie ◽  
唐凯 Tang Kai ◽  
王付印 Wang Fuyin ◽  
谢杰辉 Xie Jiehui ◽  
胡正良 Hu Zhengliang
2017 ◽  
Vol 54 (11) ◽  
pp. 110601
Author(s):  
刘加萍 Liu Jiaping ◽  
王 彦 Wang Yan ◽  
刘吉虹 Liu Jihong

2011 ◽  
Vol 23 (11) ◽  
pp. 700-702 ◽  
Author(s):  
Ming Deng ◽  
Chang-Ping Tang ◽  
Tao Zhu ◽  
Yun-Jiang Rao

2013 ◽  
Vol 31 (19) ◽  
pp. 3176-3180 ◽  
Author(s):  
Atsushi Wada ◽  
Keisuke Ikuma ◽  
Masakatsu Syoji ◽  
Satoshi Tanaka ◽  
Nobuaki Takahashi

2010 ◽  
Vol 638-642 ◽  
pp. 1009-1014 ◽  
Author(s):  
Ivan Padron ◽  
Anthony T. Fiory ◽  
Nuggehalli M. Ravindra

A novel design for a Fabry-Perot Interferometric Sensor (FPIS) consisting of a Fabry-Perot cavity formed between two bonded surfaces is discussed. The Fabry-Perot cavity and the optical fiber to which it is coupled are used as the sensing element and interconnect, respectively. The Fabry-Perot cavity is fabricated using the Micro Electro Mechanical Systems (MEMS) technology. The introduction of a center rigid body diaphragm gives this sensor considerable advantage when compared with previous Fabry-Perot cavity based sensors.


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