Linearity calibration and uncertainty evaluation for capacitance displacement sensor

2015 ◽  
Vol 23 (9) ◽  
pp. 2546-2552 ◽  
Author(s):  
葛川 GE Chuan ◽  
张德福 ZHANG De-fu ◽  
李朋志 LI Peng-zhi ◽  
郭抗 GUO Kang ◽  
李佩玥 LI Pei-yue ◽  
...  
2008 ◽  
Vol 128 (4) ◽  
pp. 289-297 ◽  
Author(s):  
Tsutomu Mizuno ◽  
Shigemi Enoki ◽  
Takashi Asahina ◽  
Takayuki Suzuki ◽  
Hiroyuki Maeda ◽  
...  

2019 ◽  
Vol 19 (21) ◽  
pp. 9680-9687 ◽  
Author(s):  
Yating Yu ◽  
Hanchao Li ◽  
Ke Xue ◽  
Dahuan Liu ◽  
Geng Gao

Micromachines ◽  
2019 ◽  
Vol 10 (12) ◽  
pp. 863 ◽  
Author(s):  
Weiqing Huang ◽  
Mengxin Sun

A piezoelectric actuator using a lever mechanism is designed, fabricated, and tested with the aim of accomplishing long-travel precision linear driving based on the stick-slip principle. The proposed actuator mainly consists of a stator, an adjustment mechanism, a preload mechanism, a base, and a linear guide. The stator design, comprising a piezoelectric stack and a lever mechanism with a long hinge used to increase the displacement of the driving foot, is described. A simplified model of the stator is created. Its design parameters are determined by an analytical model and confirmed using the finite element method. In a series of experiments, a laser displacement sensor is employed to measure the displacement responses of the actuator under the application of different driving signals. The experiment results demonstrate that the velocity of the actuator rises from 0.05 mm/s to 1.8 mm/s with the frequency increasing from 30 Hz to 150 Hz and the voltage increasing from 30 V to 150 V. It is shown that the minimum step distance of the actuator is 0.875 μm. The proposed actuator features large stroke, a simple structure, fast response, and high resolution.


Vacuum ◽  
2021 ◽  
pp. 110034
Author(s):  
Yoshinori Takei ◽  
Hajime Yoshida ◽  
Eiichi Komatsu ◽  
Kenta Arai

2021 ◽  
Vol 1826 (1) ◽  
pp. 012103
Author(s):  
Pedro Oliveira Costa Machado Neto ◽  
Paulo Cesar Ramalho Brandão ◽  
Juan Carlos Mateus Sanchez ◽  
Lúnia Coelho de Almeida de Lima ◽  
Carlos Eduardo Cardoso Galhardo

2021 ◽  
Vol 768 (1) ◽  
pp. 012008
Author(s):  
Zhen Yang ◽  
Husheng Zhang ◽  
Qiang Wang ◽  
Cuicui Li ◽  
Wenlong Xu ◽  
...  

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