Epitaxial Growth and Structural Characterization of Transparent Conducting ZnO:Al Thin Film Deposited on GaN Substrate by rf Magnetron Sputtering

2005 ◽  
Vol 47 (92) ◽  
pp. 288 ◽  
Author(s):  
Hwang Jae-Yeol ◽  
Cho Chae-Ryong ◽  
Lee Sang-A ◽  
Jeong Se-Young
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Epitaxial Growth ◽  
Structural Characterization ◽  
Rf Magnetron Sputtering ◽  
Transparent Conducting

SUPERCONDUCTING PROPERTIES OF BSCCO (2223) ULTRATHIN FILMS

2002 ◽  
Vol 09 (05n06) ◽  
pp. 1757-1760
Author(s):  
L. NAVARRETE ◽  
A. MARIÑO ◽  
H. SÁNCHEZ
Keyword(s):  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Structural Characterization ◽  
Ultrathin Films ◽  
Rf Magnetron Sputtering ◽  
Ex Situ ◽  
Thermal Treatments ◽  
Superconducting Properties

Ultrathin films of (Bi–Pb)–Sr–Ca–Cu–O (2223) were produced by ex situ RF magnetron sputtering on MgO (100) substrates. Films with different thermal treatments and thickness varying between 30 nm and 300 nm were obtained and studied systematically. A structural characterization of these samples was carried out and correlated with their electrical properties and thickness.

scholarly journals Epitaxial growth of “infinite layer” thin films and multilayers by rf magnetron sputtering

1998 ◽  
Vol 13 (8) ◽  
pp. 2195-2201 ◽  
Author(s):  
L. Fàbrega ◽  
E. Koller ◽  
J. M. Triscone ◽  
Ø. Fischer
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Epitaxial Growth ◽  
Alkaline Earth ◽  
Rf Magnetron Sputtering ◽  
Superconducting Properties ◽  
Infinite Layer ◽  
Semiconducting Behavior

We report on the preparation and characterization of epitaxial ACuO2 (A = Sr, Ca, Ba) thin films and multilayers with the so- called infinite layer (IL) structure, by rf magnetron sputtering. Films and multilayers without Ba have a remarkable crystal quality, whereas those containing this large ion are often multiphased and unstable. In spite of the excellent crystalline quality of these samples, obtaining thin films having both IL structure and displaying superconducting properties has not succeeded; our pure IL samples display semiconducting behavior, and the different procedures tried in order to dope them—annealings, introduction of disorder or cation vacancies, artificial layering—have failed. These results support that the pure IL structure ACuO2 (A = alkaline earth) cannot superconduct.

Characterization of Zn1−xMgxO transparent conducting thin films fabricated by multi-cathode RF-magnetron sputtering

2010 ◽  
Vol 518 (11) ◽  
pp. 2949-2952 ◽  
Author(s):  
K. Maejima ◽  
H. Shibata ◽  
H. Tampo ◽  
K. Matsubara ◽  
S. Niki
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Transparent Conducting
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