scholarly journals A Specific Methodology of Creep Compensation for Piezoelectric Actuators by Open-Loop Control

2013 ◽  
Vol 281 ◽  
pp. 141-145 ◽  
Author(s):  
Xuan Wang ◽  
Valérie Budinger ◽  
Yves Gourinat
Keyword(s):  
Viscoelastic Model ◽  
Piezoelectric Actuators ◽  
Open Loop ◽  
Creep Model ◽  
Relaxation Model ◽  
Open Loop Control ◽  
Loop Control ◽  
Positioning Systems ◽  
Creep Effect ◽  
Nonlinear Viscoelastic Model

Piezoelectric actuators exhibit creep behavior in open-loop operation, which may lead to unaffordable errors in high precision static positioning systems. An inversion-based compensation strategy by open-loop control is presented for reducing creep effect. The approach utilizes a nonlinear viscoelastic model to portray creep phenomenon, which consists of a linear spring, a nonlinear dashpot and a series of nonlinear Voigt elements. It is shown that for the presented creep model the step responses are very similar to the piezoelectric actuators. In order to compensate creep effect, a concept of voltage relaxation in piezoelectric actuators is proposed. And the voltage relaxation model tantamount to the inverse creep model is derived using a PID closed-loop control system. Experimental results prove that, by insertion of voltage relaxation model in open-loop operation, creep effect is attenuated markedly in piezoelectric actuators.

Precision open-loop control of piezoelectric actuator

2021 ◽  
pp. 1045389X2110482
Author(s):  
Zhigang Nie ◽  
Yuguo Cui ◽  
Jun Huang ◽  
Yiqiang Wang ◽  
Tehuan Chen
Keyword(s):  
Piezoelectric Actuator ◽  
Open Loop ◽  
Simple Expression ◽  
Creep Model ◽  
Open Loop Control ◽  
Maximum Displacement ◽  
Loop Control ◽  
Hysteresis Compensation ◽  
Rate Dependent ◽  
Partition Method

Due to space constraints, some micro-assemblies and micro-operating systems cannot install sensors, so it is challenging to achieve closed-loop control. For this reason, a precision open-loop control strategy for piezoelectric actuators is proposed. Firstly, based on the PI model and the proposed threshold partition method, the hysteresis model of the piezoelectric actuator with rate-dependent and few operators is established. Then the hysteresis error of the piezoelectric actuator is compensated by the inverse model obtained. Secondly, the creep model of the logarithmic piezoelectric actuator with simple expression and few parameters is established. Then, a creep controller without demand inverse is designed to compensate for the creep error of the piezoelectric actuator. Finally, a ZVD (Zero Vibration Derivative) input shaping method with good robustness is given to eliminate the oscillation generated by the piezoelectric actuator under the action of the step signal. The experimental results show that the displacement error of piezoelectric actuator is reduced from −9.07 to 9.46 μm to −1.22 to 1.78 μm when the maximum displacement is 120 μm after hysteresis compensation; after creeping compensation, within the action time of the 1200 s, the displacement creep of the piezoelectric actuator was reduced from 5.5 μm before compensation to 0.3 μm; after the oscillation control, the displacement overshoot of the piezoelectric actuator is reduced to 0.6% of that before control.

Multi-DOF compensation of piezoelectric actuators with recursive databases

2018 ◽  
Vol 66 (8) ◽  
pp. 656-664 ◽  
Author(s):  
Christopher Schindlbeck ◽  
Christian Pape ◽  
Eduard Reithmeier
Keyword(s):  
Tracking Control ◽  
Control Design ◽  
Cross Coupling ◽  
Piezoelectric Actuators ◽  
Nonlinear Effects ◽  
Open Loop ◽  
Degree Of Freedom ◽  
Decoupling Control ◽  
Open Loop Control ◽  
Loop Control

Abstract Piezoelectric actuators are subject to nonlinear effects when voltage-driven in open-loop control. In particular, hysteresis and creep effects are dominating nonlinearities that significantly deteriorate performance in tracking control scenarios. In this paper, we present an online compensator suitable for piezoelectric actuators that is based on the modified Prandtl-Ishlinskii model and utilizes recursive databases for the compensation of nonlinearities. The compensator scheme is furthermore extended to systems with more than one degree of freedom (DOF) such as Cartesian manipulators by employing a decoupling control design to mitigate inherent cross-coupling disturbances. In order to validate our theoretical derivations, experiments are conducted with coupled trajectories on a commercial 3-DOF micro-positioning unit driven by piezoelectric actuators.

scholarly journals Pneumatic Servo Bearing Actuator with Multiple Bearing Pads for Ultraprecise Positioning

2013 ◽  
Vol 7 (5) ◽  
pp. 498-505 ◽  
Author(s):  
Shuhei Tsujimura ◽  
◽  
Yusuke Hashimoto ◽  
Takashi Matsuoka ◽  
Tomoko Hirayama ◽  
...  
Keyword(s):  
Research And Development ◽  
Dynamic Characteristics ◽  
Large Scale ◽  
Thrust Bearing ◽  
Open Loop ◽  
Open Loop Control ◽  
Positioning Accuracy ◽  
Loop Control ◽  
Positioning Systems ◽  
The Difference

With the increase in demand for semiconductor products, ultrafine linear patterning technologies for Large-Scale Integrations (LSIs) have been making progress. The requested positioning accuracy in such ultraprecise apparatuses is of nanometer order. To meet such specific needs, the research and development of a variety of actuators has been necessary. Our laboratory has developed a ‘Pneumatic Servo Bearing Actuator (PSBA),’ a novel actuator that uses pneumatic servo technology for ultraprecise positioning. Our past studies have showed that the minimum resolution of PSBA was almost 6 nm, even under open loop control; thus, we concluded that the PSBA was a promising actuator in advanced ultraprecise positioning systems. However, the stroke of the PSBA was comparatively short. To expand the stroke of the actuator, we proposed and developed a new PSBA with multiple thin thrust-bearing pads. The main purpose in this study is to investigate the positioning properties of the new PSBA with multiple thrust bearing pads. The obtained characteristics of the PSBA can be enumerated as follows. (1) The PSBA with multiple bearing pads achieves a longer stroke than the PSBA with a single pad. (2) The difference in the thickness of the bearing pads affects the dynamic characteristics of the actuator. (3) The minimum positioning resolution of the developed PSBA with twenty-nine bearing pads is about 2 – 4 nm with feedback control.

Open-loop control of compensation for optical propagation through a turbulent shear flow

1998 ◽  
Author(s):  
C. Truman ◽  
Lenore McMackin ◽  
Robert Pierson ◽  
Kenneth Bishop ◽  
Ellen Chen
Keyword(s):  
Shear Flow ◽  
Open Loop ◽  
Turbulent Shear ◽  
Turbulent Shear Flow ◽  
Open Loop Control ◽  
Loop Control ◽  
Optical Propagation

Precise open-loop control of MEMS deformable mirror shape

2008 ◽  
Author(s):  
Thomas Bifano ◽  
Jason Stewart ◽  
Alioune Diouf
Keyword(s):  
Open Loop ◽  
Deformable Mirror ◽  
Open Loop Control ◽  
Loop Control

Responses and Optimization of a PID-Based Speed Regulating System of the Planetary Mixer

2011 ◽  
Vol 418-420 ◽  
pp. 1865-1868
Author(s):  
Ming Jin Yang ◽  
Xi Wen Li ◽  
Zhi Gang Wang ◽  
Tie Lin Shi
Keyword(s):  
Control System ◽  
Open Loop ◽  
Open Loop Control ◽  
Efficient Operation ◽  
Loop Control ◽  
Loop Control System ◽  
Response Optimization ◽  
Close Loop Control ◽  
Close Loop Control System

The performance of speed regulating is very important to the mixing process with safe, efficient operation and high quality of production. Strategies and practices of responses and optimization of a PID-based speed regulating system of a planetary mixer were presented in this paper. Research results show that: by means of the signal constraint function presented by Simulink Response Optimization, optimization PID parameters of the 2-DOF-PID controller can be obtained, and the response of close-loop control system has quite good performance of overshoot, response time, and stability compared with an open-loop control system.

Experimental Verification of Open-loop Control for an Underwater Eel-like Robot

2002 ◽  
Vol 21 (10-11) ◽  
pp. 849-859 ◽  
Author(s):  
Kenneth A. Mcisaac ◽  
James P. Ostrowski
Keyword(s):  
Experimental Work ◽  
Experimental Verification ◽  
Vision System ◽  
Open Loop ◽  
Open Loop Control ◽  
Loop Control ◽  
Position Sensing ◽  
Theoretical Predictions ◽  
Approximate Expressions ◽  
Good Agreement

In this paper, we describe experimental work using an underwater, biomimetic, eel-like robot to verify a simplified dynamic model and open-loop control routines. We compare experimental results to previous analytically derived, but approximate expressions for proposed gaits for forward/backward swimming, circular swimming, sideways swimming and turning in place. We have developed a five-link, underwater eel-like robot, focusing on modularity, reliability and rapid prototyping, to verify our theoretical predictions. Results from open-loop experiments performed with this robot in an aquatic environment using an off-line vision system for position sensing show good agreement with theory.

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