TiO2 Nanoparticles Thin Film Prepared by Electrostatic Spray Deposition Technique for Humidity-Sensing Device
2015 ◽
Vol 1131
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pp. 153-156
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Keyword(s):
Titanium dioxide (TiO2) nanoparticles thin films were prepared by electrostatic spray deposition technique. The effect of the deposition times on properties of TiO2 films was investigated. The characteristics of TiO2 thin films were performed by X-ray diffraction, and Raman spectroscopy. In addition, the TiO2 nanoparticles thin film was deposited onto the interdigited electrodes to fabricate the humidity sensor device. The humidity adsorption and desorption properties of the sensor were studies. The sensing mechanism of the humidity device can be explained by complex impedance analysis.
2013 ◽
Vol 2013
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pp. 1-7
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2016 ◽
Vol 848
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pp. 103-106
2020 ◽
Vol 31
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pp. 12206-12215
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Vol 40
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pp. 9319-9326
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Vol 1
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pp. 45-49
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