Predictive Maintenance through Condition Monitoring at Diffusion Equipment of a Solar Cell Manufacturing Environment

This paper analyzes failures at diffusion equipments in a solar cell manufacturing. The history was gathered and analyze. This paper starts with prioritizing the frequent failures through Pareto Analysis and starts to discuss potential method to reduce its failure. The Root Cause Analysis with probability ratio was created by the team and they had identified potential Condition Monitoring. This diffusion equipment stores most parameter and process readings that makes the automatic Condition Monitoring possible. The Condition Monitoring on one of the parameter readings was implemented and it has shown a high reduction in that equipment failures.