Effect of Oxygen on CVD Diamond Film Deposition

2012 ◽  
Vol 482-484 ◽  
pp. 891-894
Author(s):  
Yuan Sheng Huang ◽  
Cheng Ping Luo ◽  
Wan Qi Qiu
Keyword(s):  
Oxygen Content ◽  
Vapor Deposition ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Cvd Diamond ◽  
Film Deposition ◽  
Chemical Vapor Deposition Method ◽  
Deposition Method ◽  
Cvd Diamond Film ◽  
Effect Of Oxygen

CVD diamond films were synthesized by the chemical vapor deposition method. With increasing the oxygen content in the deposition atmosphere, the density of diamond nuclei decreases. No diamond is formed when the oxygen content is more than one percent. The density of diamond nuclei is improved with increasing the methane content. Adding oxygen to the deposition atmosphere can enhance the purity of diamond.

Effect of Nitrous Oxide Gas on Cvd Diamond Film Deposition

1990 ◽  
Vol 180 ◽  
Author(s):  
H. Koinuma ◽  
M. Yoshimoto ◽  
Y. Takagi ◽  
A. B. Sawaoka ◽  
T. HaHashimoto ◽  
...  
Keyword(s):  
Nitrous Oxide ◽  
Vapor Deposition ◽  
Carbon Film ◽  
Chemical Vapor ◽  
Cvd Diamond ◽  
Film Deposition ◽  
Phase Reaction ◽  
Vapor Phase Reaction ◽  
Cvd Diamond Film ◽  
Hot Filament

ABSTRACTThe addition of nitrous oxide (N2O) gas in the hot-filament chemical vapor deposition of carbon film from mixtures of methane and hydrogen was found to increase remarkably the content of diamond structure in the film. Increased particle size and crystal orientation parallel to the (111) direction were also obtained by the N2O addition. Mass spectrometry revealed that the vapor phase reaction was scarcely affected by the N2O addition.

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