Application of High Aspect Ratio Scanning Probe in Microstructure Measurement

2009 ◽  
Vol 69-70 ◽  
pp. 123-127
Author(s):  
M.M. Fu ◽  
K.K. Guo ◽  
Y. Chen ◽  
Y.H. Yang ◽  
Bing Feng Ju

An experiment, which is based on a self-developed pure tungsten high aspect ratio scanning probe, was conducted to measure the topography of a micro channel and a complex microstructure respectively. Comparison and analysis of both results by the tungsten probe and a single-crystal diamond probe were carried out. It indicates that the newly developed pure tungsten scanning probe has the capability in topography measurement, particularly fit for the high aspect ratio surface measurement.

2019 ◽  
Vol 255 ◽  
pp. 126556
Author(s):  
Jiao Fu ◽  
Yanfeng Wang ◽  
Juan Wang ◽  
Zhangcheng Liu ◽  
Ruozheng Wang ◽  
...  

2017 ◽  
Vol 180 ◽  
pp. 20-24 ◽  
Author(s):  
Y. Lisunova ◽  
M. Spieser ◽  
R.D.D. Juttin ◽  
F. Holzner ◽  
J. Brugger

2019 ◽  
Vol 115 (19) ◽  
pp. 192401 ◽  
Author(s):  
D. Rohner ◽  
J. Happacher ◽  
P. Reiser ◽  
M. A. Tschudin ◽  
A. Tallaire ◽  
...  

2009 ◽  
Vol 113 (16) ◽  
pp. 6815-6820 ◽  
Author(s):  
Yoshie Narui ◽  
Donato M. Ceres ◽  
Jinyu Chen ◽  
Konstantinos P. Giapis ◽  
C. Patrick Collier

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