High-aspect-ratio single-crystal Si microelectromechanical systems

1998 ◽  
Author(s):  
Jason W. Weigold ◽  
Stella W. Pang
Keyword(s):  
Aspect Ratio ◽  
Single Crystal ◽  
High Aspect Ratio ◽  
Microelectromechanical Systems

Fabrication of hundreds of microns three-dimensional single crystal diamond channel along with high aspect ratio by two-step process

2019 ◽  
Vol 255 ◽  
pp. 126556
Author(s):  
Jiao Fu ◽  
Yanfeng Wang ◽  
Juan Wang ◽  
Zhangcheng Liu ◽  
Ruozheng Wang ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Single Crystal ◽  
High Aspect Ratio ◽  
Three Dimensional ◽  
Step Process ◽  
Single Crystal Diamond

High-Aspect-Ratio Structures for MEMS

MRS Bulletin ◽  
2001 ◽  
Vol 26 (4) ◽  
pp. 307-308 ◽  
Author(s):  
Stella W. Pang
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Electromechanical Coupling ◽  
Microelectromechanical Systems ◽  
Parallel Plates ◽  
Increased Sensitivity ◽  
Micromechanical Structures

Many microelectromechanical systems (MEMS) use the changing capacitance of movable parallel plates to drive and sense motion. An increase in this capacitance improves the performance of these micromechanical structures by means of increased electromechanical coupling for lower driving voltages and increased sensitivity of the micromechanical motion.

Application of High Aspect Ratio Scanning Probe in Microstructure Measurement

2009 ◽  
Vol 69-70 ◽  
pp. 123-127
Author(s):  
M.M. Fu ◽  
K.K. Guo ◽  
Y. Chen ◽  
Y.H. Yang ◽  
Bing Feng Ju
Keyword(s):  
Aspect Ratio ◽  
Single Crystal ◽  
High Aspect Ratio ◽  
Scanning Probe ◽  
Surface Measurement ◽  
Micro Channel ◽  
Pure Tungsten ◽  
Single Crystal Diamond ◽  
Comparison And Analysis ◽  
Diamond Probe

An experiment, which is based on a self-developed pure tungsten high aspect ratio scanning probe, was conducted to measure the topography of a micro channel and a complex microstructure respectively. Comparison and analysis of both results by the tungsten probe and a single-crystal diamond probe were carried out. It indicates that the newly developed pure tungsten scanning probe has the capability in topography measurement, particularly fit for the high aspect ratio surface measurement.

Fabrication of high aspect ratio self-aligned stepped polysilicon electrode for single-crystal silicon microstructure

2015 ◽  
Vol 23 (5) ◽  
pp. 1319-1325 ◽  
Author(s):  
Weilong You ◽  
Lei Zhang ◽  
Xiaofei Wang ◽  
Wenshan Wei ◽  
Weifeng Xia ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Single Crystal ◽  
High Aspect Ratio ◽  
Single Crystal Silicon ◽  
Crystal Silicon
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