scholarly journals Fabrication and probabilistic fracture strength prediction of high-aspect-ratio single crystal silicon carbide microspecimens with stress concentration

2007 ◽  
Vol 515 (6) ◽  
pp. 3283-3290 ◽  
Author(s):  
N.N. Nemeth ◽  
L.J. Evans ◽  
O.M. Jadaan ◽  
W.N. Sharpe ◽  
G.M. Beheim ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Stress Concentration ◽  
Aspect Ratio ◽  
Single Crystal ◽  
Fracture Strength ◽  
High Aspect Ratio ◽  
Single Crystal Silicon ◽  
Strength Prediction ◽  
Crystal Silicon

Fabrication of high aspect ratio self-aligned stepped polysilicon electrode for single-crystal silicon microstructure

2015 ◽  
Vol 23 (5) ◽  
pp. 1319-1325 ◽  
Author(s):  
Weilong You ◽  
Lei Zhang ◽  
Xiaofei Wang ◽  
Wenshan Wei ◽  
Weifeng Xia ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Single Crystal ◽  
High Aspect Ratio ◽  
Single Crystal Silicon ◽  
Crystal Silicon
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