Analytical Study of the Thermal and Optical Properties Effect on the Collinear Deflection Method

Recently, study of transparent materials, such as thin film form, have an important field for the development of advanced electronic devices. Therefore, the need for the precision thermal property measurement techniques of transparent thin film materials becomes increasing according to the development of these material. The ideal methods for optically measurements of these properties are noncontact method. However, optically measurements are often difficult due to the transparency. So, transparent materials have not enough temperature gradient in the air layer above thin films. To solve this problem, we used the collinear deflection method which is one of the photothermal deflection methods. In the measurement process, both of the pump beam and probe beam are irradiated vertically on the transparent sample. And the probe beam is deflected by refractive index variation of samples due to the temperature gradient inside samples.The purpose of this study is to analyze the effect of thermal and optical properties analytically on the collinear deflection method for variable materials.