CMP Behavior of α-Alumina-g-Polyvinylpyrrolidone Composite Abrasive on Hard Disk Substrate
2010 ◽
Vol 97-101
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pp. 2135-2139
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Keyword(s):
Α Al2o3
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A novel α-alumina-g-polyvinylpyrrolidone (α-Al2O3-g-PVP) composite abrasive was prepared by surface grafting polymerization. The chemical mechanical polishing (CMP) performances of the composite abrasive on hard disk substrate were investigated with a UNIPOL-1502 polishing machine. Analyses on the surface of polished substrate indicated that the α-Al2O3-g-PVP composite abrasive exhibited lower surface roughness, less scratch, and improved post-CMP cleaning performances than pure α-alumina abrasive under the same testing conditions.
2011 ◽
Vol 338
◽
pp. 415-420
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2014 ◽
Vol 43
(11)
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pp. 4186-4192
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2013 ◽
Vol 753-755
◽
pp. 333-336
2012 ◽
Vol 5
(2)
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pp. 119
Keyword(s):
2010 ◽
Vol 44-47
◽
pp. 3067-3071
2009 ◽
Vol 255
(22)
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pp. 9100-9104
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Keyword(s):
Keyword(s):