CMP of hard disk substrate using a colloidal SiO2 slurry: preliminary experimental investigation
Keyword(s):
2013 ◽
Vol 690-693
◽
pp. 3209-3212
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Keyword(s):
2014 ◽
Vol 43
(11)
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pp. 4186-4192
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2013 ◽
Vol 562-565
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pp. 691-696
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Keyword(s):
2010 ◽
Vol 97-101
◽
pp. 2135-2139
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