Low Energy Ar+ Ions Scattering from SiO2 (001)<Ῑ10> Surface under Grazing Incidence

This article presents the results of computer modeling of small-angle scattering of Ar+ ions from the surface of the SiO2 thin film under bombardment by low-energy. The study of the trajectory of the scattered ions showed that the trajectories with two focuses are observed not only near the center of the semichannel but also nearby the surface of the atomic chain. An increase in the value of the initial energy of incident particles leads to a narrowing of the trajectory of the scattered ions, which leads to the appearance of low-intensity peaks in the energy spectrum of the scattered ions.

Download Full-text

Depth-Resolved Structure Analysis of Cylindrical Microdomain in Block Copolymer Thin Film by Grazing-Incidence Small-Angle X-ray Scattering Utilizing Low-Energy X-rays

Macromolecules ◽

10.1021/acs.macromol.5b01883 ◽

2015 ◽

Vol 48 (22) ◽

pp. 8190-8196 ◽

Cited By ~ 20

Author(s):

Itsuki Saito ◽

Tsukasa Miyazaki ◽

Katsuhiro Yamamoto

Keyword(s):

Thin Film ◽

Block Copolymer ◽

Structure Analysis ◽

Small Angle ◽

Grazing Incidence ◽

Low Energy ◽

X Rays ◽

X Ray ◽

X Ray Scattering ◽

Ray Scattering

Download Full-text

Grazing-incidence Small-angle Scattering as a Tool for Thin Film Microstructure and Interface Analysis

Transactions of the Materials Research Society of Japan ◽

10.14723/tmrsj.32.275 ◽

2007 ◽

Vol 32 (1) ◽

pp. 275-280

Author(s):

Hiroshi Okuda ◽

Shojiro Ochiai ◽

M. Ohtaka ◽

Tetsu Ichitubo ◽

Ei-ichiro Matsubara, ◽

...

Keyword(s):

Thin Film ◽

Small Angle ◽

Grazing Incidence ◽

Small Angle Scattering ◽

Interface Analysis ◽

Angle Scattering ◽

Film Microstructure

Download Full-text

Structure Determination in Thin Film Geometry Using Grazing Incidence Small-Angle Scattering

Polymer Surfaces and Interfaces ◽

10.1007/978-3-540-73865-7_2 ◽

2008 ◽

pp. 17-46 ◽

Cited By ~ 9

Author(s):

Peter Müller-Buschbaum

Keyword(s):

Thin Film ◽

Structure Determination ◽

Small Angle ◽

Grazing Incidence ◽

Small Angle Scattering ◽

Angle Scattering

Download Full-text

Studies on Polymer Thin Film Structure by X-ray and Neutron Reflectivity and Grazing Incidence Small Angle Scattering

NIPPON GOMU KYOKAISHI ◽

10.2324/gomu.84.37 ◽

2011 ◽

Vol 84 (1) ◽

pp. 37-41

Author(s):

Hiroki OGAWA ◽

Toshiji KANAYA

Keyword(s):

Thin Film ◽

Small Angle ◽

Grazing Incidence ◽

Film Structure ◽

Small Angle Scattering ◽

Neutron Reflectivity ◽

Polymer Thin Film ◽

X Ray ◽

Thin Film Structure ◽

Angle Scattering

Download Full-text

Grazing exit small angle X-ray scattering on grain formation in polycrystalline metal films

Zeitschrift für Kristallographie - Crystalline Materials ◽

10.1524/zkri.2007.222.11.601 ◽

2007 ◽

Vol 222 (11/2007) ◽

Cited By ~ 2

Author(s):

Wei Zhang ◽

Ian K. Robinson

Keyword(s):

Thin Film ◽

Small Angle ◽

Ostwald Ripening ◽

Grazing Incidence ◽

Metal Films ◽

Nanostructured Thin Film ◽

X Ray Scattering ◽

Angle Scattering ◽

In Situ Diffraction

We recently proposed a new grazing exit geometry for measuring the small-angle scattering from thin film materials, which we call GESAXS, to contrast with the successful grazing incidence version, GISAXS. The technique is particularly useful for probing nanostructured thin film materials, especially when the coherence properties of the beam are employed. Here we demonstrate the application of GESAXS to evaporated metal films, prepared using an in-situ diffraction chamber, to investigate how their structure evolves upon annealing. Contrasting behavior is seen for Au, which preserves a roughly exponential distribution of domain sizes, and Fe for which the size distribution narrows by an Ostwald ripening process.

Download Full-text

Grazing-incidence small-angle scattering measurement of Ge islands capped with a Si layer

Applied Physics Letters ◽

10.1063/1.1509112 ◽

2002 ◽

Vol 81 (13) ◽

pp. 2358-2360 ◽

Cited By ~ 16

Author(s):

Hiroshi Okuda ◽

Shojiro Ochiai ◽

Kazuki Ito ◽

Yoshiyuki Amemiya

Keyword(s):

Small Angle ◽

Grazing Incidence ◽

Small Angle Scattering ◽

Angle Scattering ◽

Scattering Measurement

Download Full-text

Grazing-Incidence Small-Angle Scattering. Morphology of Deposited Clusters and Nanostructure of Thin Films

Journal of Applied Crystallography ◽

10.1107/s002188989700099x ◽

1997 ◽

Vol 30 (5) ◽

pp. 822-827 ◽

Cited By ~ 79

Author(s):

A. Naudon ◽

D. Thiaudiere

Keyword(s):

Silicon Wafer ◽

Small Angle ◽

Grazing Incidence ◽

Morphological Characterization ◽

Full Potential ◽

Synchrotron Source ◽

Flat Substrate ◽

Transmission Electron ◽

Angle Scattering ◽

Imaging Plates

It is shown that grazing-incidence small-angle X-ray scattering (GISAXS) is a new experimental technique that combines both grazing incidence and scattering at low angles. The experiments are carried out at or near the critical angle: the result is a considerably enhanced surface sensitivity. It allows morphological characterization of aggregates deposited or gathered on a flat substrate, such as silicon wafer or Coming glass. The full potential of this technique is realized when using a synchrotron source (flux, collimation and choice of wavelength in order to avoid fluorescence or to perform anomalous measurements) and when patterns are recorded with two-dimensional detectors: gas detectors or imaging plates (IPs). It is then possible to study the anisotropic shape of the scattering pattern and to determine the sizes of the aggregates. Results are presented for gold clusters deposited on a silicon wafer covered by a carbon sublayer in order to make a comparison with transmission electron microscopy and with scanning probe microscopy. Other examples are presented in order to highlight the advantages of such a technique applied to small inclusions in thin surface layers.

Download Full-text