Study on Hole Making in EACVD Thick Diamond Film

Few research works have been reported on hole making in EACVD thick diamond film, though many papers have been published on the preparation and smoothing of the film. In this paper, YAG laser and EDM were used to make holes in un-doped and Boron-doped diamond film respectively. Fundamental investigation was carried out on the effects of processing parameters on the holing efficiency and processed surface quality. The film surface was analyzed by means of Raman spectrum before and after holing. It is shown that YAG laser has a higher processing efficiency than EDM, but the latter can get a rounder hole.