Study on the Electrical Properties of Direct-Patternable SBT Films Formed by Photochemical Metal-Organic Deposition

2007 ◽  
Vol 544-545 ◽  
pp. 1061-1064
Author(s):  
Hyeong Ho Park ◽  
Hyung Ho Park ◽  
Ho Jung Chang ◽  
Hyeong Tag Jeon

The ferroelectric properties of UV irradiated and non-irradiated SBT thin films using photosensitive starting precursors were investigated. The observation of surface microstructure showed that UV irradiation and increase in anneal temperature induced the grain growth of SBT. The measured remnant polarization values of UV irradiated and non-irradiated SBT films after anneal at 700oC were 5.8 and 4.7 )C/cm2 and after anneal at 750oC, the values were 10.8 and 9.3 )C/cm2, respectively.

2006 ◽  
Vol 928 ◽  
Author(s):  
Christoph Peters ◽  
Matthias Bockmeyer ◽  
Reinhard Krüger ◽  
André Weber ◽  
Ellen Ivers-Tiffée

ABSTRACTVia metal organic deposition (MOD) sapphire substrates were multiple dip-coated with a molecular dispersive 8 mol% Y2O3 doped ZrO2 (8YSZ) sol to prepare dense, crack-free thin films. The thin films were consecutively exposed to a tempering program with several rapid thermal annealing (RTA) steps and a final dwell temperature between 500 °C and 1400 °C for 24 h. Grain growth, phase, stoichiometry and macroscopic density of the thin films were analyzed by XRD and SEM. Grain sizes ranged between a few nanometers in diameter at 500 °C and several hundreds of nanometers at 1400 °C.


2009 ◽  
Vol 117 (1365) ◽  
pp. 604-607 ◽  
Author(s):  
Hyeong-Ho PARK ◽  
Hong-Sub LEE ◽  
Hyung-Ho PARK ◽  
Ross H. HILL ◽  
Yun Taek HWANG

2005 ◽  
Vol 98 (1) ◽  
pp. 013507 ◽  
Author(s):  
Kais Daoudi ◽  
Tetsuo Tsuchiya ◽  
Iwao Yamaguchi ◽  
Takaaki Manabe ◽  
Susumu Mizuta ◽  
...  

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