Quasi-Epitaxial Growth of Silicon Layers by Hydrogen Reactive Magnetron Sputtering at Temperatures as Low as 200 °C

2001 ◽  
Vol 80-81 ◽  
pp. 65-70 ◽  
Author(s):  
Y. Leconte ◽  
Richard Rizk ◽  
F. Gourbilleau ◽  
P. Voivenel ◽  
M. Lejeune ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Epitaxial Growth ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron

Epitaxial growth and orientation of AlN thin films on Si(001) substrates deposited by reactive magnetron sputtering

2006 ◽  
Vol 100 (12) ◽  
pp. 123514 ◽  
Author(s):  
E. Valcheva ◽  
J. Birch ◽  
P. O. Å. Persson ◽  
S. Tungasmita ◽  
L. Hultman
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Epitaxial Growth ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron

Epitaxial growth of W-doped VO2/V2O3 multilayer on α-Al2O3(110) by reactive magnetron sputtering

2000 ◽  
Vol 375 (1-2) ◽  
pp. 128-131 ◽  
Author(s):  
P Jin ◽  
M Tazawa ◽  
K Yoshimura ◽  
K Igarashi ◽  
S Tanemura ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Epitaxial Growth ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Α Al2o3
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