Spatially varied orientation selective epitaxial growth of CeO2(100) and (110) regions on Si(100) substrates by reactive magnetron sputtering utilizing electron beam irradiation

2012 ◽  
Vol 520 (19) ◽  
pp. 6179-6182 ◽  
Author(s):  
Tomoyasu Inoue ◽  
Shigenari Shida
Keyword(s):  
Electron Beam ◽  
Magnetron Sputtering ◽  
Epitaxial Growth ◽  
Electron Beam Irradiation ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Beam Irradiation ◽  
Selective Epitaxial Growth

Properties and Mechanism of Si Selective Epitaxial Growth on Al2O3using Electron Beam Irradiation

1993 ◽  
Vol 32 (Part 1, No. 6A) ◽  
pp. 2582-2586 ◽  
Author(s):  
Makoto Ishida ◽  
Takashi Tomita ◽  
Masahiko Fujita ◽  
Tetsuro Nakamura
Keyword(s):  
Electron Beam ◽  
Epitaxial Growth ◽  
Electron Beam Irradiation ◽  
Beam Irradiation ◽  
Selective Epitaxial Growth

Selective epitaxial growth of Si on sapphire using electron beam irradiation

1989 ◽  
Vol 55 (16) ◽  
pp. 1636-1638 ◽  
Author(s):  
Kazuaki Sawada ◽  
Makoto Ishida ◽  
Tetsuro Nakamura ◽  
Tetso Suzaki
Keyword(s):  
Electron Beam ◽  
Epitaxial Growth ◽  
Electron Beam Irradiation ◽  
Beam Irradiation ◽  
Selective Epitaxial Growth

Quasi-Epitaxial Growth of Silicon Layers by Hydrogen Reactive Magnetron Sputtering at Temperatures as Low as 200 °C

2001 ◽  
Vol 80-81 ◽  
pp. 65-70 ◽  
Author(s):  
Y. Leconte ◽  
Richard Rizk ◽  
F. Gourbilleau ◽  
P. Voivenel ◽  
M. Lejeune ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Epitaxial Growth ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron

Effect of high-energy electron beam irradiation on the properties of AZO thin films prepared by rf magnetron sputtering

2010 ◽  
Vol 518 (22) ◽  
pp. 6236-6240 ◽  
Author(s):  
Eui-Jung Yun ◽  
Jin Woo Jung ◽  
Kyung Nam Ko ◽  
Jongha Hwang ◽  
Byung Cheol Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Magnetron Sputtering ◽  
Electron Beam Irradiation ◽  
Rf Magnetron Sputtering ◽  
High Energy ◽  
Energy Electron ◽  
High Energy Electron ◽  
Beam Irradiation
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