scholarly journals Epitaxial Growth of CaMnO 3– y Films on LaAlO 3 (112¯0) by Pulsed Direct Current Reactive Magnetron Sputtering

2022 ◽  
pp. 2100504
Author(s):  
Erik Ekström ◽  
Anna Elsukova ◽  
Justine Grasland ◽  
Justinas Palisaitis ◽  
Ganpati Ramanath ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Epitaxial Growth ◽  
Direct Current ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Pulsed Direct Current

Effect of Duty Cycle on Characteristics of CrNxThin Films Deposited by Pulsed Direct Current Reactive Magnetron Sputtering

2013 ◽  
Vol 52 (11S) ◽  
pp. 11NB08 ◽  
Author(s):  
Chi-Lung Chang ◽  
Bo-Yi Wu ◽  
Pin-Hung Chen ◽  
Wei-Chih Chen ◽  
Chun-Ta Ho ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Direct Current ◽  
Duty Cycle ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Pulsed Direct Current

Quasi-Epitaxial Growth of Silicon Layers by Hydrogen Reactive Magnetron Sputtering at Temperatures as Low as 200 °C

2001 ◽  
Vol 80-81 ◽  
pp. 65-70 ◽  
Author(s):  
Y. Leconte ◽  
Richard Rizk ◽  
F. Gourbilleau ◽  
P. Voivenel ◽  
M. Lejeune ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Epitaxial Growth ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron
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