scholarly journals IMPEDANCE MATCHING CONTROLLER FOR AN INDUCTIVELY COUPLED PLASMA CHAMBER - L-type Matching Network Automatic Controller

2007 ◽  
Keyword(s):  
Inductively Coupled Plasma ◽  
Impedance Matching ◽  
Matching Network ◽  
Plasma Chamber ◽  
Inductively Coupled

A High Power Inductively Coupled Plasma Torch and Impedance Matching Network

1979 ◽  
Vol 33 (1) ◽  
pp. 56-58 ◽  
Author(s):  
D. L. Windsor ◽  
D. R. Heine ◽  
M. B. Denton
Keyword(s):  
High Power ◽  
Inductively Coupled Plasma ◽  
Plasma Torch ◽  
Impedance Matching ◽  
Matching Network ◽  
Inductively Coupled

Versatile impedance matching network for inductively coupled plasma spectrometry

1989 ◽  
Vol 61 (22) ◽  
pp. 2589-2592 ◽  
Author(s):  
Akbar. Montaser ◽  
Izumi. Ishii ◽  
R. H. Clifford ◽  
S. A. Sinex ◽  
S. G. Capar
Keyword(s):  
Inductively Coupled Plasma ◽  
Impedance Matching ◽  
Matching Network ◽  
Plasma Spectrometry ◽  
Inductively Coupled ◽  
Inductively Coupled Plasma Spectrometry

scholarly journals Online tuning of impedance matching circuit for long pulse inductively coupled plasma source operation—An alternate approach

2014 ◽  
Vol 85 (1) ◽  
pp. 013510 ◽  
Author(s):  
Dass Sudhir ◽  
M. Bandyopadhyay ◽  
W. Kraus ◽  
A. Gahlaut ◽  
G. Bansal ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Impedance Matching ◽  
Plasma Source ◽  
Inductively Coupled ◽  
Source Operation ◽  
Long Pulse ◽  
Online Tuning

Ion Density Distribution in an Inductively Coupled Plasma Chamber

2004 ◽  
Vol 6 (2) ◽  
pp. 2233-2236 ◽  
Author(s):  
Chen Junfang ◽  
Zhao Wenfeng ◽  
Wu Xianqiu ◽  
Fan Shuangli ◽  
Fu Silie
Keyword(s):  
Density Distribution ◽  
Inductively Coupled Plasma ◽  
Ion Density ◽  
Plasma Chamber ◽  
Inductively Coupled

Effects of matching network on the hysteresis during E and H mode transitions in argon inductively coupled plasma

2010 ◽  
Vol 17 (10) ◽  
pp. 103507 ◽  
Author(s):  
Fei Gao ◽  
Shu-Xia Zhao ◽  
Xiao-Song Li ◽  
You-Nian Wang
Keyword(s):  
Inductively Coupled Plasma ◽  
Matching Network ◽  
Inductively Coupled ◽  
Mode Transitions
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