Monte Carlo Simulation Study: the effects of double-patterning versus single-patterning on the line-edge-roughness (LER) in FDSOI Tri-gate MOSFETs
2013 ◽
Vol 13
(5)
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pp. 511-515
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2008 ◽
Vol 32
(2)
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pp. 63-68
Keyword(s):
2021 ◽
Vol 574
◽
pp. 126014
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