Monte Carlo Simulation Study: the effects of double-patterning versus single-patterning on the line-edge-roughness (LER) in FDSOI Tri-gate MOSFETs

2013 ◽  
Vol 13 (5) ◽  
pp. 511-515 ◽  
Author(s):  
In Jun Park ◽  
Changhwan Shin

1999 ◽  
Vol 97 (11) ◽  
pp. 1173-1184 ◽  
Author(s):  
R. Berardi, M. Fehervari, C. Zannoni






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