scholarly journals A Study on the Heat Transfer Characteristics of the Large Dimension Heater Plate for a Semiconductor Process

2010 ◽  
Vol 43 (6) ◽  
pp. 309-314 ◽  
Author(s):  
Yun-Yong Lee ◽  
Hwan-Kook Kang ◽  
Seok-Hwan Moon
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