scholarly journals Plasma Resistance Evaluation and Characteristics of Yttria Ceramics Sintered by Using Calcination Yttria

Author(s):  
Jin Sam Choi

2013 ◽  
Vol 50 (5) ◽  
pp. 348-352 ◽  
Author(s):  
Jinsam Choi ◽  
Tadachika Nakayama ◽  
Won Tae Bae


2017 ◽  
Vol 43 (12) ◽  
pp. 1864
Author(s):  
Yan-Zhi MAO ◽  
Chun-Jie LI ◽  
Yan-Feng HU ◽  
Cui HUA ◽  
Jia YOU ◽  
...  


2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Hyeon-Myeong Oh ◽  
Young-Jo Park ◽  
Ha-Neul Kim ◽  
Kundan Kumar ◽  
Jae-Woong Ko ◽  
...  

AbstractMotivated by recent finding of crystallographic-orientation-dependent etching behavior of sintered ceramics, the plasma resistance of nanocrystalline Y2O3-MgO composite ceramics (YM) was evaluated for the first time. We report a remarkably high plasma etching resistance of nanostructure YM surpassing the plasma resistance of commercially used transparent Y2O3 and MgAl2O4 ceramics. The pore-free YM ceramic with grain sizes of several hundred nm was fabricated by hot press sintering, enabling theoretical maximum densification at low temperature. The insoluble two components effectively suppressed the grain growth by mutual pinning. The engineering implication of the developed YM nanocomposite imparts enhanced mechanical reliability, better cost effectiveness with excellent plasma resistance property over their counterparts in plasma using semiconductor applications.



AMB Express ◽  
2020 ◽  
Vol 10 (1) ◽  
Author(s):  
Hexiang Luan ◽  
Wenlin Liao ◽  
Yingpei Song ◽  
Haopeng Niu ◽  
Ting Hu ◽  
...  


1996 ◽  
Vol 10 ◽  
pp. 153-154
Author(s):  
O.D. Pedersen ◽  
J. Sidelmann ◽  
J. Gram ◽  
J. Jespersen


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