Plasma‐resistance evaluation of yttrium oxyfluoride coating prepared by aerosol deposition method

Author(s):  
Hiroaki Ashizawa ◽  
Katsumi Yoshida

2004 ◽  
Vol 45 (2) ◽  
pp. 369-372 ◽  
Author(s):  
Tomohito Maki ◽  
Satoshi Sugimoto ◽  
Toshio Kagotani ◽  
Koichiro Inomata ◽  
Jun Akedo




Author(s):  
Kentaro Shinoda ◽  
Jun Akedo




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