Three-dimensional imaging and tilt-angle analysis of dislocations in 4H-SiC by two-photon-excited band-edge photoluminescence

2014 ◽  
Vol 7 (12) ◽  
pp. 121303 ◽  
Author(s):  
Ryohei Tanuma ◽  
Masahiro Nagano ◽  
Isaho Kamata ◽  
Hidekazu Tsuchida
2015 ◽  
Vol 821-823 ◽  
pp. 343-346 ◽  
Author(s):  
Ryohei Tanuma ◽  
Hidekazu Tsuchida

This paper demonstrates three-dimensional imaging of threading screw dislocations (TSDs) and threading edge dislocations (TEDs) in 4H-SiC using two-photon-excited photoluminescence (2PPL) band-edge emission. Three-dimensional (3D) images of TSDs and TEDs are successfully obtained as dark contrasts on a bright background of band-edge emission. The intensity inversion of a 2PPL 3D image yields a perspective to visually examine the propagation behavior of dislocations. The tilt angles of TEDs are also measured and shown to correlate with the directions of the extra half planes of TEDs.


2001 ◽  
Vol 158 (1) ◽  
pp. 49-55 ◽  
Author(s):  
Carrie L. Phillips ◽  
Lois J. Arend ◽  
Adele J. Filson ◽  
Doug J. Kojetin ◽  
Jeffrey L. Clendenon ◽  
...  

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