Functional Imaging: Three-Dimensional Imaging of Diffusion Volumes in Silicon Circuits by Use of the Two- Photon Optical-Beam- Induced Current Effect

2002 ◽  
Vol 13 (12) ◽  
pp. 17
Author(s):  
D. T. Reid ◽  
E. Ramsay ◽  
K. Wilsher
Keyword(s):  
Functional Imaging ◽  
Three Dimensional ◽  
Optical Beam ◽  
Induced Current ◽  
Current Effect ◽  
Three Dimensional Imaging ◽  
Two Photon ◽  
Optical Beam Induced Current

Three-Dimensional Nanometric Sub-Surface Imaging of a Silicon Flip-Chip Using the Two-Photon Optical Beam Induced Current Method

2007 ◽  
Author(s):  
E. Ramsay ◽  
K. A. Serrels ◽  
M. J. Thomson ◽  
A. J. Waddie ◽  
R. J. Warburton ◽  
...  
Keyword(s):  
Flip Chip ◽  
Three Dimensional ◽  
Current Method ◽  
Optical Beam ◽  
Lateral Resolution ◽  
Surface Imaging ◽  
Induced Current ◽  
Axial Resolution ◽  
Two Photon ◽  
Optical Beam Induced Current

Abstract By implementing two-photon optical-beam-induced current microscopy using a solid-immersion lens, imaging inside a silicon flip chip is reported with 166nm lateral resolution and an axial resolution capable of resolving features only 100nm in height.

Three-dimensional nanometric sub-surface imaging of a silicon flip-chip using the two-photon optical beam induced current method

2007 ◽  
Vol 47 (9-11) ◽  
pp. 1534-1538 ◽  
Author(s):  
E. Ramsay ◽  
K.A. Serrels ◽  
M.J. Thomson ◽  
A.J. Waddie ◽  
R.J. Warburton ◽  
...  
Keyword(s):  
Flip Chip ◽  
Three Dimensional ◽  
Current Method ◽  
Optical Beam ◽  
Surface Imaging ◽  
Induced Current ◽  
Two Photon ◽  
Optical Beam Induced Current

scholarly journals Two-photon optical-beam-induced current imaging of indium gallium nitride blue light-emitting diodes

1999 ◽  
Vol 24 (20) ◽  
pp. 1407 ◽  
Author(s):  
Fu-Jen Kao ◽  
Mao-Kuo Huang ◽  
Yung-Shun Wang ◽  
Sheng-Lung Huang ◽  
Ming-Kwei Lee ◽  
...  
Keyword(s):  
Gallium Nitride ◽  
Blue Light ◽  
Indium Gallium Nitride ◽  
Light Emitting Diodes ◽  
Optical Beam ◽  
Induced Current ◽  
Light Emitting ◽  
Two Photon ◽  
Indium Gallium ◽  
Optical Beam Induced Current
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