Fabrication and Characterization of Double-Layer Pb(Zr,Ti)O3Thin Films for Micro-Electromechanical Systems

2012 ◽  
Vol 51 (9S1) ◽  
pp. 09LD12 ◽  
Author(s):  
Kensuke Kanda ◽  
Junichi Inoue ◽  
Takashi Saito ◽  
Takayuki Fujita ◽  
Kohei Higuchi ◽  
...  
2012 ◽  
Vol 51 ◽  
pp. 09LD12 ◽  
Author(s):  
Kensuke Kanda ◽  
Junichi Inoue ◽  
Takashi Saito ◽  
Takayuki Fujita ◽  
Kohei Higuchi ◽  
...  

2016 ◽  
Vol 332 ◽  
pp. 8-15 ◽  
Author(s):  
Guangjun Wang ◽  
Xiangying Wu ◽  
Yixiao Cai ◽  
Yuan Ji ◽  
Azra Yaqub ◽  
...  

2017 ◽  
Vol 308 ◽  
pp. 167-172 ◽  
Author(s):  
Yabing Wen ◽  
Shaojing Yang ◽  
Sui Gu ◽  
Xiaofeng Ye ◽  
Zhaoyin Wen

2019 ◽  
Vol 35 (4) ◽  
pp. 475-484
Author(s):  
SHIVA ARUN ◽  
◽  
PRABHA BHARTIYA ◽  
AMREEN NAZ ◽  
SUDHEER RAI ◽  
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2019 ◽  
Vol 139 (11) ◽  
pp. 375-380
Author(s):  
Harutoshi Takahashi ◽  
Yuta Namba ◽  
Takashi Abe ◽  
Masayuki Sohgawa

2015 ◽  
Vol 135 (11) ◽  
pp. 474-475
Author(s):  
Koji Sugano ◽  
Ryoji Hiraoka ◽  
Toshiyuki Tsuchiya ◽  
Osamu Tabata

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