Large-Area Organosilicon Film Deposition Using Cyclonic Atmospheric Pressure Glow Discharge
2013 ◽
Vol 52
(5S2)
◽
pp. 05EA01
◽
2003 ◽
Vol 163-164
◽
pp. 323-330
◽
2003 ◽
Vol 79
(10)
◽
pp. 1002-1008
◽
2005 ◽
Vol 14
(4)
◽
pp. 757-765
◽
2009 ◽
Vol 37
(11)
◽
pp. 2207-2212
◽
2015 ◽
Vol 87
(14)
◽
pp. 7218-7225
◽