Study of an atmospheric pressure glow discharge (APG) for thin film deposition

2003 ◽  
Vol 163-164 ◽  
pp. 323-330 ◽  
Author(s):  
Rüdiger Foest ◽  
Frank Adler ◽  
Florian Sigeneger ◽  
Martin Schmidt
Keyword(s):  
Thin Film ◽  
Glow Discharge ◽  
Atmospheric Pressure ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Atmospheric Pressure Glow Discharge ◽  
Pressure Glow Discharge

Organic thin film deposition in atmospheric pressure glow discharge

1996 ◽  
Author(s):  
S. Okazaki ◽  
M. Kogoma ◽  
T. Yokoyama ◽  
M. Kodama ◽  
H. Nomiyama ◽  
...  
Keyword(s):  
Thin Film ◽  
Glow Discharge ◽  
Atmospheric Pressure ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Atmospheric Pressure Glow Discharge ◽  
Organic Thin Film ◽  
Pressure Glow Discharge

Large-Area Organosilicon Film Deposition Using Cyclonic Atmospheric Pressure Glow Discharge

2013 ◽  
Vol 52 (5S2) ◽  
pp. 05EA01 ◽  
Author(s):  
Jin-He Lin ◽  
Ching-Yuan Tsai ◽  
Wei-Ting Liu ◽  
Yu-Kai Syu ◽  
Chun Huang
Keyword(s):  
Glow Discharge ◽  
Atmospheric Pressure ◽  
Film Deposition ◽  
Atmospheric Pressure Glow Discharge ◽  
Large Area ◽  
Pressure Glow Discharge

Production of Atmospheric-Pressure Glow Discharge

2003 ◽  
Vol 79 (10) ◽  
pp. 1002-1008 ◽  
Author(s):  
Koichi TAKAKI ◽  
Tamiya FUJIWARA ◽  
Fumiyoshi TOCHIKUBO
Keyword(s):  
Glow Discharge ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Glow Discharge ◽  
Pressure Glow Discharge

Liquid Sampling-Atmospheric Pressure Glow Discharge Ionization Source for Elemental Mass Spectrometry

2011 ◽  
Vol 83 (7) ◽  
pp. 2425-2429 ◽  
Author(s):  
R. Kenneth Marcus ◽  
C. Derrick Quarles ◽  
Charles J. Barinaga ◽  
Anthony J. Carado ◽  
David W. Koppenaal
Keyword(s):  
Mass Spectrometry ◽  
Glow Discharge ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Glow Discharge ◽  
Ionization Source ◽  
Pressure Glow Discharge ◽  
Elemental Mass ◽  
Elemental Mass Spectrometry ◽  
Liquid Sampling
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