Large area silicon dioxide deposition using rf atmospheric pressure glow discharge at low termperature

2006 ◽  
Author(s):  
Man Hyeop Han ◽  
Joo Hyon Noh ◽  
Jai Hyuk Choi ◽  
Yong Ki Lee ◽  
Hong Koo Baik ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Silicon Dioxide ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Glow Discharge ◽  
Large Area ◽  
Pressure Glow Discharge

Large-Area Organosilicon Film Deposition Using Cyclonic Atmospheric Pressure Glow Discharge

2013 ◽  
Vol 52 (5S2) ◽  
pp. 05EA01 ◽  
Author(s):  
Jin-He Lin ◽  
Ching-Yuan Tsai ◽  
Wei-Ting Liu ◽  
Yu-Kai Syu ◽  
Chun Huang
Keyword(s):  
Glow Discharge ◽  
Atmospheric Pressure ◽  
Film Deposition ◽  
Atmospheric Pressure Glow Discharge ◽  
Large Area ◽  
Pressure Glow Discharge

Production of Atmospheric-Pressure Glow Discharge

2003 ◽  
Vol 79 (10) ◽  
pp. 1002-1008 ◽  
Author(s):  
Koichi TAKAKI ◽  
Tamiya FUJIWARA ◽  
Fumiyoshi TOCHIKUBO
Keyword(s):  
Glow Discharge ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Glow Discharge ◽  
Pressure Glow Discharge

Liquid Sampling-Atmospheric Pressure Glow Discharge Ionization Source for Elemental Mass Spectrometry

2011 ◽  
Vol 83 (7) ◽  
pp. 2425-2429 ◽  
Author(s):  
R. Kenneth Marcus ◽  
C. Derrick Quarles ◽  
Charles J. Barinaga ◽  
Anthony J. Carado ◽  
David W. Koppenaal
Keyword(s):  
Mass Spectrometry ◽  
Glow Discharge ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Glow Discharge ◽  
Ionization Source ◽  
Pressure Glow Discharge ◽  
Elemental Mass ◽  
Elemental Mass Spectrometry ◽  
Liquid Sampling
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