Low-temperature synthesis of carbon nitride by microwave plasma CVD

2015 ◽  
Vol 55 (1S) ◽  
pp. 01AA15 ◽  
Author(s):  
Ippei Tanaka ◽  
Yukihiro Sakamoto
Keyword(s):  
Low Temperature ◽  
Carbon Nitride ◽  
Microwave Plasma ◽  
Plasma Cvd ◽  
Low Temperature Synthesis ◽  
Temperature Synthesis ◽  
Microwave Plasma Cvd

Low-Temperature Synthesis of Diamond Films Using Magneto-Microwave Plasma CVD

1990 ◽  
Vol 29 (Part 2, No. 8) ◽  
pp. L1483-L1485 ◽  
Author(s):  
Jin Wei ◽  
Hiroshi Kawarada ◽  
Jun-ichi Suzuki ◽  
Akio Hiraki
Keyword(s):  
Low Temperature ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Plasma Cvd ◽  
Low Temperature Synthesis ◽  
Temperature Synthesis ◽  
Microwave Plasma Cvd

Low-temperature graphene synthesis using microwave plasma CVD

2013 ◽  
Vol 46 (6) ◽  
pp. 063001 ◽  
Author(s):  
Takatoshi Yamada ◽  
Jaeho Kim ◽  
Masatou Ishihara ◽  
Masataka Hasegawa
Keyword(s):  
Low Temperature ◽  
Microwave Plasma ◽  
Plasma Cvd ◽  
Graphene Synthesis ◽  
Microwave Plasma Cvd

Low-Temperature Growth of Polycrystalline AlN Films by Microwave Plasma CVD

1990 ◽  
Vol 29 (Part 2, No. 2) ◽  
pp. L358-L360 ◽  
Author(s):  
Yoshihiro Someno ◽  
Makoto Sasaki ◽  
Toshio Hirai
Keyword(s):  
Low Temperature ◽  
Microwave Plasma ◽  
Plasma Cvd ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Microwave Plasma Cvd

Growth of carbon nitride using microwave plasma CVD

2005 ◽  
Vol 475 (1-2) ◽  
pp. 198-201 ◽  
Author(s):  
Yukihiro Sakamoto ◽  
Matsufumi Takaya
Keyword(s):  
Carbon Nitride ◽  
Microwave Plasma ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd
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