Low-temperature graphene synthesis using microwave plasma CVD

2013 ◽  
Vol 46 (6) ◽  
pp. 063001 ◽  
Author(s):  
Takatoshi Yamada ◽  
Jaeho Kim ◽  
Masatou Ishihara ◽  
Masataka Hasegawa
Keyword(s):  
Low Temperature ◽  
Microwave Plasma ◽  
Plasma Cvd ◽  
Graphene Synthesis ◽  
Microwave Plasma Cvd

Low-Temperature Growth of Polycrystalline AlN Films by Microwave Plasma CVD

1990 ◽  
Vol 29 (Part 2, No. 2) ◽  
pp. L358-L360 ◽  
Author(s):  
Yoshihiro Someno ◽  
Makoto Sasaki ◽  
Toshio Hirai
Keyword(s):  
Low Temperature ◽  
Microwave Plasma ◽  
Plasma Cvd ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Microwave Plasma Cvd

Low-Temperature Synthesis of Diamond Films Using Magneto-Microwave Plasma CVD

1990 ◽  
Vol 29 (Part 2, No. 8) ◽  
pp. L1483-L1485 ◽  
Author(s):  
Jin Wei ◽  
Hiroshi Kawarada ◽  
Jun-ichi Suzuki ◽  
Akio Hiraki
Keyword(s):  
Low Temperature ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Plasma Cvd ◽  
Low Temperature Synthesis ◽  
Temperature Synthesis ◽  
Microwave Plasma Cvd

scholarly journals Direct Synthesis of Large-Area Graphene on Insulating Substrates at Low Temperature using Microwave Plasma CVD

ACS Omega ◽  
2019 ◽  
Vol 4 (6) ◽  
pp. 11263-11270 ◽  
Author(s):  
Riteshkumar Vishwakarma ◽  
Rucheng Zhu ◽  
Amr Attia Abuelwafa ◽  
Yota Mabuchi ◽  
Sudip Adhikari ◽  
...  
Keyword(s):  
Low Temperature ◽  
Microwave Plasma ◽  
Direct Synthesis ◽  
Plasma Cvd ◽  
Large Area ◽  
Microwave Plasma Cvd ◽  
Insulating Substrates
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